Publications associées à Unified rule based correction for corners in proximity lithography mask using high resolution features

Publications associées (28)

Nanoliter Liquid Packaging in a Bioresorbable Microsystem by Additive Manufacturing and its Application as a Controlled Drug Delivery Device

Jürgen Brugger, Arnaud Bertsch, Cristina Martin Olmos, Jongeon Park

Precise packaging of nanoliter amounts of liquid in a microsystem is important for many biomedical applications. However, existing liquid encapsulation technologies have limitations in terms of liquid waste, evaporation, trapped bubbles, and liquid degrada ...

2023

First developments towards producing inductive magnetic sensors using state-of-the-art photolithography techniques

Ambrine Douhane, Marcus Cemes, Duccio Testa

Inductive magnetic sensors are needed for tokamak operation to provide the low-frequency (LF) measurements leading to the equilibrium reconstruction and to monitor the higher frequency (HF) instabilities; the HF magnetic sensors are often also used as a ba ...

2023

Printed degradable piezoelectric microsystems: From ink formulation to device fabrication and characterization

Morgan Mc Kay Monroe

As the world moves further and further into the semiconductor era, the amount of waste generated from electronics ("e-waste") is increasing rapidly and unsustainably. Of particular note, alternatives to lead-based piezoelectric materials must be establishe ...

EPFL2023

A hybrid Selective Laser Sintering based process for the additive manufacturing of architectured composites

Erwan Philippe Guenier

Additive Manufacturing also commonly referred as 3D printing has been given a lot of interest lately. Market is growing exponentially and the aim for obtaining more complex and ready-to use parts is emerging. All the 3D printing processes consist in buildi ...

EPFL2023

Dataset for 'Printed ecoresorbable temperature sensors for environmental monitoring'

Danick Briand, Nicolas Francis Fumeaux, James Alec Pierce Bourely

This data set contains the data collected during the FNS project Green Piezo (Grant no. 179064) in association with the recent publication entitled “Printed ecoresorbable temperature sensors for environmental monitoring”. This work aims to study the effect ...

Zenodo2023

Electrode Impact on the Electrical Breakdown of Dielectric Elastomer Thin Films

Herbert Shea, Fabio Beco Albuquerque

Dielectric Elastomer Actuators (DEAs) enable the realization of energy-efficient and compact actuator systems. DEAs operate at the kilovolt range with typically microampere-level currents and hence minimize thermal losses in comparison to low voltage/high ...

MDPI2023

The physics of 3D printing with light

Christophe Moser

The goal of 3D printing is to realize complex 3D structures by locally adding material in small volume elements called voxels - in contrast to successively subtracting material by etching, milling or machining. This field started with optics-based proposal ...

Nature Portfolio2023

Laser-Induced Forward Transfer of Functional Microdevices

Zhiwei Yang

Laser-induced forward transfer (LIFT) technique is an emerging micro additive manufacturing (AM) technique that has been widely used to print a variety of materials. Distinguished from other nozzle-based AM techniques, LIFT operates without the existence o ...

EPFL2023

On the Fabric of a 3D Printed Soil

Alessio Ferrari

3D printing of earthen materials is on the rise in the field of Additive Manufacturing (AM) due to the opportunity this technique offers to realize structures and manufacts with low environmental impacts, but very little is known about the hydromechanical ...

2023

Low-temperature processing of screen-printed piezoelectric KNbO3 with integration onto biodegradable paper substrates

Danick Briand, Luis Guillermo Villanueva Torrijo, Morgan Mc Kay Monroe

The development of fully solution-processed, biodegradable piezoelectrics is a critical step in the development of green electronics towards the worldwide reduction of harmful electronic waste. However, recent printing processes for piezoelectrics are hind ...

2023

Print-Light-Synthesis of Gold Thin Film Electrodes for Electrochemical Sensing

Andreas Stephan Lesch, Horst Pick

The one-step fabrication of gold films by inkjet printing of a gold precursor ink and its photochemical reduction by exposure to UV light is presented. Inkjet printing creates on a substrate with high control micrometer-thin reaction volumes in which upon ...

Wiley2023

Light-Based Printing of Leachable Salt Molds for Facile Shaping of Complex Structures

Cyril Henri Dénéréaz

3D printing is a powerful manufacturing technology for shaping materials into complex structures. While the palette of printable materials continues to expand, the rheological and chemical requisites for printing are not always easy to fulfill. Here, a uni ...

Wiley-V C H Verlag Gmbh2022

Scalable fabrication of functional nanostructures on stretchable substrates by capillary-assisted particle assembly and adhesion lithography

Henry Shao-Chi Yu

The fabrication of metallic nanostructures on stretchable substrates enables specific applications that exploit the combination of the nano-scale phenomena and the mechanical tunability of the physical dimensions of the nanostructures. Due to the large dif ...

EPFL2022

Additive manufacturing of ceramics by two-photon lithography, volumetric 3D printing and high-resolution endo-printing

Georgia Konstantinou

Additive manufacturing is a growing sector of industrial production that allows the fabrication of parts with complex geometries and reduced waste. The context of this thesis is light-based additive manufacturing technologies. In the first part of the the ...

EPFL2022

Functional Ink Formulation for Printing and Coating of Graphene and Other 2D Materials: Challenges and Solutions

Frank Nüesch, Jakob Heier, Sina Abdolhosseinzadeh, Mohammad Jafarpour

The properties of 2D materials are unparalleled when compared to their 3D counterparts; many of these properties are a consequence of their size reduction to only a couple of atomic layers. Metallic, semiconducting, and insulating types can be found and fo ...

WILEY2022

A Low-Temperature Annealing Method for Alloy Nanostructures and Metasurfaces: Unlocking a Novel Degree of Freedom

Olivier Martin, Christian Santschi, Hsiang-Chu Wang, Jeonghyeon Kim, Debdatta Ray

The material and exact shape of a nanostructure determine its optical response, which is especially strong for plasmonic metals. Unfortunately, only a few plasmonic metals are available, which limits the spectral range where these strong optical effects ca ...

Wiley-V C H Verlag Gmbh2022

Edge-Contact MoS2 Transistors Fabricated Using Thermal Scanning Probe Lithography

Jürgen Brugger, Giovanni Boero, Xia Liu, Ana Conde Rubio

The science and engineering of two-dimensional materials (2DMs), in particular, of 2D semiconductors, is advancing at a thriving pace. It is well known that these delicate few-atoms thick materials can be damaged during the processing toward their integrat ...

2022

Controlling motion at the nanoscale with light

Mintae Chung

Optical manipulation at the micro- nano-scale is a fascinating topic due to its inherent non-invasive properties and multifaceted applications in various fields such as biology, sensing, micro-fluidics, and micro- nano-robotics. This thesis involves intens ...

EPFL2022

Optimization and equilibrium problems with discrete choice models

Stefano Bortolomiol

Many transportation markets are characterized by oligopolistic competition. In these markets customers, suppliers and regulators make decisions that are influenced by the preferences and the decisions of all other agents. In particular, capturing and under ...

EPFL2022

Heterogeneity in decentralized asset markets

Julien Hugonnier

We study a canonical model of decentralized exchange for a durable good or asset, where agents are assumed to have time-varying, heterogeneous utility types. Whereas the existing literature has focused on the special case of two types, we allow agents' uti ...

ECONOMETRIC SOCIETY2022