Publications associées à High-speed phase-shifting common-path quantitative phase imaging with a piezoelectric actuator

Recent Advances in Piezoelectric Materials for Electromechanical Transducer Applications

Ferroelectricity has made a huge impact on science and technology since Joseph Valasek (then a Ph.D. student at the University of Minnesota) discovered it in 1920, a little longer than 100 years ago. Whereas Dr. Valasek's original research was motivated by ...

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC2022

Lifetime of dielectric elastomer actuators under DC electric fields

Fabio Beco Albuquerque

Dielectric elastomer actuators (DEAs) are interesting soft actuators compared to other actuation technologies owing to large achievable actuation strains, high energy density and fast actuation. However, because DEAs need to be operated under high electric ...

EPFL2022

Sensorless Quasi-static Piezoelectric Actuator for Micro-Robotics

Louis Antoine Masson

Research interest into the miniaturisation of micro-robots has soared in recent years due to the availability of suitable integrated actuators. The reduction in size of these components is achieved through the implementation of Self-Sensing Actuation (SSA) ...

EPFL2020

Quasi-Rayleigh model for modeling hysteresis of piezoelectric actuators

Dragan Damjanovic, Meng Zhang

Piezoelectric actuators (PEAs) have been widely used in nano-positioning applications for their high resolution of displacement. However, hysteresis, which is an inherent property of ferroelectric PEAs has been shown to significantly degrade the system per ...

2020

Study of self-sensing actuation strategies for quasi-static piezoelectric actuators

Yves Perriard, Louis Antoine Masson

Self-sensing actuation in piezoelectric actuators has been a growing research topic since 1992, with two main approaches having been identified: either by evaluating the dielectric displacement field within the piezoelectric through a measurement bridge, e ...

IEEE2019

An optimized self-sensing piezoelectric cantilever for micro-robotic applications

Yves Perriard, Louis Antoine Masson, Xinchang Liu

Quasi-static piezoelectric actuators are used in micro-robotics due to the small displacements they can achieve, and they have been proven to be suitable for Self-Sensing Actuation (SSA) applications. The morphology and material of an actuator, and therefo ...

2019

Port: A Piezoelectric Optical Resonance Tuner

Michail Zervas, Tobias Kippenberg

This abstract presents an aluminum nitride (AlN) piezoelectric actuator for tuning optical resonance modes of silicon nitride photonic resonators. The AlN actuator is fabricated on top of a thick silicon dioxide cladding that encapsulates the nitride reson ...

IEEE2018

Acoustic emission source detection and wave generation on a working plate using piezoelectric actuators

Xinchang Liu

In modern automated assembly lines, part feeders play an important role to separate and sort parts. Agility and flexibility are required to achieve a good yield for different types of parts. The common working principle is to vibrate a working plate driven ...

EPFL2017

3D monolithic dielectrophoretic actuators and resonators written by femtosecond laser

Tao Yang

The last few decades have witnessed exciting advances in micro-opto-electro-mechanical systems (MOEMS) including revolutionary development of fabrication processes and an ever increasing expansion of their domain of applications. In parallel, femtosecond l ...

EPFL2017

Influence of Piezoelectric Actuator Geometry on Resonant Vibrating Amplitude

Yves Perriard, Yoan René Cyrille Civet, Dan Shi

Piezoelectric actuator has been used in different applications because of its compact structure compared to magnetic actuators. This paper reports the influence of piezoelectric actuators geometry on the plate vibrating amplitude. Through a Finite Element ...

IEEE2016

Modelling of Mechanical Interaction in Piezoelectric Actuated Resonant System

Dan Shi

Automatic assembly system has been continuously drawing attention since the beginning of the 20th century. Parts feeding system is one of the important subsystems. The parts feeding system is used for delivering bulk parts into separated individual parts. ...

EPFL2016

Microdevices for Locomotion in Complex Biological Fluids

Tian Qiu

Locomotion is an essential feature for survival of many organisms, and it is also a technical requirement for untethered biomedical microdevices to operate inside the human body for targeted drug delivery and minimally invasive surgery. The overall goal of ...

EPFL2016

Advanced sol-gel processing of PZT thin films for piezoelectric MEMS structures

Nachiappan Chidambaram

Micro-electro-mechanical systems (MEMS) technology is revolutionizing industrial and consumer products by replacing bulky devices by miniaturized versions that are suitable for portable applications as for instance in mobile phones. Besides small size, the ...

EPFL2014

Characterization of piezoelectric material for micro thermal harvesters

Paul Muralt, Emilie Catherine Sylviane Trioux

This paper presents the first realizations of a novel concept for thermal energy harvesting at micro scale. The devices proposed here are based on a two-step transduction combining thermo-mechanical and piezoelectric conversion. In this contribution, we pr ...

IOP Publishing Ltd2014

Optimal design of a squeeze film actuator for friction feedback

Yves Perriard, Christophe Winter, Yoan René Cyrille Civet

Sense of touch belongs to one of the five Human Senses. Whereas blind people largely use feeling in everyday life, sighted person mainly focus on hearing and vision. However, haptic interface started being introduced in customers applications, such as smar ...

IEEE Computer Society2013

Piezoelectric Actuators Characterization

Pierre-André Farine, Alexis Boegli, Christian Robert, Patrick Stadelmann

This paper describes a system to drive piezoelectric actuators over more than one decade of voltages and one octave of frequencies, in order to perform high-speed complex impedance characterization at a user chosen voltage excitation level. This characteri ...

Ieee Computer Soc2012

Optical Modulators Based on Microfabricated Tilting Flaps Operating at low Actuation Voltages

Fabio Jutzi

In this thesis the concept, modelling, design, fabrication process and characterization of novel optical modulators are presented. The devices consist of flaps exhibiting a large tilt with electrostatic actuation at low voltages. The applications comprise, ...

EPFL2012

Epitaxial Piezoelectric MEMS on Silicon

Don Isarakorn

Integration of new functional materials into silicon microsystems is a key factor to enable technology for a wide range of innovative MEMS devices. Piezoelectric materials are of primary interest for integrating sensing and actuation functions in MEMS due ...

EPFL2011

Reliable MEMS Actuators for Driving Large Microsystems

Nicolas Bernard Golay

Nowadays many consumer electronic devices are using small engines (micromotors). Thanks to technological innovation, the components can be imbedded into numerous portable systems. The key factors for a nomadic integration are: reduction of power consumptio ...

EPFL2010

The gas flow rate increase obtained by an oscillating piezoelectric actuator on a micronozzle

Jürgen Brugger

Micronozzles with piezoelectric actuator were fabricated and investigated. The micronozzles were fabricated in glass substrates using a powderblasting technique, and the actuator is a bimorph structure made from a piezoelectric polymer. The actuator was lo ...

2008