Characterization of a Piezoelectric AlN Beam Array in Air and Fluid for an Artificial Basilar Membrane

In this study, we present a piezoelectric artificial basilar membrane (ABM) composed of a 10-channel aluminum nitride beam array. Each beam varies in length from 1306 to 3194 mu m for mimicking the frequency selectivity of the cochlea. To characterize the frequency selectivity of the ABM, we measured the mechanical displacement and piezoelectric output while applying acoustic stimulus at 100 dB sound pressure level in the range of 500 Hz-40 kHz. The resonance frequencies measured by mechanical displacement and piezoelectric output were in the range of 10.56-36.5 and 10.9-37.0 kHz, respectively. In addition, the electrical stimulus was applied to the ABMs to compare the mechanical responses in air and fluid. The measured resonance frequencies were in the range of 11.1-47.7 kHz in the air and 3.10-11.9 kHz in the fluid. Understanding the characteristics of the ABM is important for its potential use as a key technology for auditory prostheses.