Electrical and optical properties of Ta-Si-N thin films deposited by reactive magnetron sputtering

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Abstract The degradation of metal interconnects (ICs) in Solid Oxide Cells (SOCs) primarily results from chromium (Cr) oxide scale growth on stainless-steel substrates, causing ohmic loss and air-side electrode poisoning by Cr. This thesis addresses these ...

Electrical and optical properties of Ta-Si-N thin films deposited by reactive magnetron sputtering

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