Publication

Capacitive flexible force sensor

Martinus Adela Maria Gijs
2010
Conference Papers

Résumé

We have realized a flexible force sensor, composed of four redundant capacitors, the operation of which is based on the measurement of a load-induced capacitance change. We use polyimide both as flexible substrate and as elastic dielectric between two levels of finger-shaped aluminum electrodes. In particular we have developed a technology for realization of polyimide micro-features with gentle slopes to facilitate subsequent metallization processes. Thereby, we could improve step coverage and electrical contacting between the two metallization levels, as well as the mechanical stability of the sensor. The smooth polyimide slopes were obtained by combining lithographic resist-reflow techniques with dry etching procedures. We have electrically characterized the capacitors using an impedance analyzer and obtained a typical force sensitivity of 1-2 fF/N.

Source officielle

https://infoscience.epfl.ch/entities/publication/4139f80c-48ac-47b3-9179-11d20a746ef6

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Martinus Adela Maria Gijs
2010
Conference Papers

Résumé

Source officielle

https://infoscience.epfl.ch/entities/publication/4139f80c-48ac-47b3-9179-11d20a746ef6

À propos de ce résultat

Concepts associés (32)

Flexible electronics

Flexible electronics, also known as flex circuits, is a technology for assembling electronic circuits by mounting electronic devices on flexible plastic substrates, such as polyimide, PEEK or transparent conductive polyester film. Additionally, flex circuits can be screen printed silver circuits on polyester. Flexible electronic assemblies may be manufactured using identical components used for rigid printed circuit boards, allowing the board to conform to a desired shape, or to flex during its use.

Capacitive sensing

In electrical engineering, capacitive sensing (sometimes capacitance sensing) is a technology, based on capacitive coupling, that can detect and measure anything that is conductive or has a dielectric constant different from air. Many types of sensors use capacitive sensing, including sensors to detect and measure proximity, pressure, position and displacement, force, humidity, fluid level, and acceleration. Human interface devices based on capacitive sensing, such as touchpads, can replace the computer mouse.

Electrical resistivity and conductivity

Electrical resistivity (also called volume resistivity or specific electrical resistance) is a fundamental specific property of a material that measures its electrical resistance or how strongly it resists electric current. A low resistivity indicates a material that readily allows electric current. Resistivity is commonly represented by the Greek letter ρ (rho). The SI unit of electrical resistivity is the ohm-metre (Ω⋅m).

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Capacitive flexible force sensor

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