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Strained nanomechanical resonators have recently achieved quality factors of 1 billion through the phenomenon of dissipation dilution. Remarkably, the potential of these devices seems unexhausted, exhibiting a scaling law of roughly one order of magnitude (in Q factor) every three years. This paper reviews advances which led to this point, including phononic crystal "soft-clamping," strain engineering, and a trend towards centimeter-scale devices with extreme aspect ratios. Recent trends include investigation of strained crystalline thin films, fractal-patterned supports, and machine-learning-optimized supports. New possibilities emerging from these advances range from cavity free quantum optomechanics to ultra-sensitive accelerometry.
Rosario Scopelliti, Marinella Mazzanti, Farzaneh Fadaei Tirani, Ivica Zivkovic, Mikhail Batov
Marinella Mazzanti, Marta Falcone, Luciano Barluzzi
Alfredo Pasquarello, Giacomo Francesco Leonardo Miceli