Scanning probe microscope

A scanning probe microscope (10) is described, comprising a probe (1) with a cantilever (11) carrying a tip (12), the scanning probe microscope configured to generate a first actuating motion changing a distance of the tip (12) with respect to a sample surface, a detector (4) configured to detect a tip position and to output a tip position signal, a control circuit (5) configured to generate a first control signal using the tip position signal, the scanning probe microscope being configured to generate a second actuating motion adapting a distance between the probe (1) and the sample surface using the first control signal, wherein the control circuit (5) is configured to generate a second control signal, the scanning probe microscope being configured to generate, using the second control signal, a third actuating motion at least partially opposing detachment-induced oscillations of the cantilever (11) induced by detaching of the tip (12) from the sample surface while retracting the probe (1).