Smart Slit Assembly Employing Continuously Tunable MEMS Shutter

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The field of micro electromechanical systems (MEMS) evolved from the microelectronic industry and the technologies developed to fabricate integrated circuits. As a result, MEMS are commonly fabricated on silicon wafers. The development of MEMS has been dri ...

Smart Slit Assembly Employing Continuously Tunable MEMS Shutter

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