The development and application of imaging EXAFS spectromicroscopy

The capability to perform absorption spectroscopy with hard x-rays was added to the synchrotron imaging spectromicroscopy technique. We present several successful test cases. First, the EXAFS (extended x-ray absorption fine structure) analysis was implemented in areas as small as few mu m(2) for transition-metal K edge absorption spectra. The corresponding structural information was complemented by chemical information from the near-edge region. Specifically, in the case of a cross-sectional cut steel different Fe oxidation states were found at different depths. Tests on a PVD grown TiN film revealed areas with oxidized Ti. Overall, these tests demonstrate the feasibility of combining structural and chemicals analysis with hard x ray absorption and high lateral resolution.