Micro-beamer based on MEMS micro-mirrors and laser light source

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Publications associées (31)

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A photonic assembly, a laser setup comprising said photonic assembly and a method for performing frequency-modulated continuous-wave light detection and ranging using said laser setup are disclosed. The photonic assembly (1) comprises an active photonic ch ...

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Photonic integrated circuits (PICs) are the subject of massive interest due to the range of applications they can provide at a huge scale while building on well-established CMOS technologies. One of the critical parameters defining a technology's maturity ...

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Capacitive micromachined ultrasonic transducers (CMUTs) are regarded as an attractive candidate in bio-applications such as imaging and molecule monitoring. However, the previous researches on biochemical sensing are mostly air-coupled application based on ...

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A new versatile hybrid MEMS technology for high sensitivity, fluid proof sensing applications

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The field of micro electromechanical systems (MEMS) evolved from the microelectronic industry and the technologies developed to fabricate integrated circuits. As a result, MEMS are commonly fabricated on silicon wafers. The development of MEMS has been dri ...

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The past decade has witnessed major advances in the development and system-level applications of photonic integrated microcombs, that are coherent, broadband optical frequency combs with repetition rates in the millimeter-wave to terahertz domain. Most of ...

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The present invention relates to an electrically tunable photonic resonator device for a component having a fast and flat actuation response, comprising: - At least one optical waveguide with an optical interface for coupling in laser light, - At least one ...

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