Publication

MEMS Capacitive Pressure Sensor Based on Polysilicon Sealed Membrane

Mihai Adrian Ionescu, Montserrat Fernandez-Bolanos Badia
2006
Conference Papers

Résumé

This paper presents a pressure sensor based on a variable capacitor formed by a movable polysilicon sealed membrane sensitive to pressure. When operated as a pressure sensor two operation regions are observed, an exponentially sensitivity region at low pressure (0-100mmHg) and a linear sensitivity region (20-400kPa) in the touch operation mode. Preliminary results show a sensitivity of 2.2fF/mmHg and are in good agreement with analytical and finite-element simulations.

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https://infoscience.epfl.ch/entities/publication/0ef50916-5496-4992-9a9e-b8b9a07a1b11

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Mihai Adrian Ionescu, Montserrat Fernandez-Bolanos Badia
2006
Conference Papers

Résumé

Source officielle

https://infoscience.epfl.ch/entities/publication/0ef50916-5496-4992-9a9e-b8b9a07a1b11

À propos de ce résultat

Concepts associés (11)

Pressure measurement

Pressure measurement is the measurement of an applied force by a fluid (liquid or gas) on a surface. Pressure is typically measured in units of force per unit of surface area. Many techniques have been developed for the measurement of pressure and vacuum. Instruments used to measure and display pressure mechanically are called pressure gauges, vacuum gauges or compound gauges (vacuum & pressure). The widely used Bourdon gauge is a mechanical device, which both measures and indicates and is probably the best known type of gauge.

Capacitor types

Capacitors are manufactured in many styles, forms, dimensions, and from a large variety of materials. They all contain at least two electrical conductors, called plates, separated by an insulating layer (dielectric). Capacitors are widely used as parts of electrical circuits in many common electrical devices. Capacitors, together with resistors and inductors, belong to the group of passive components in electronic equipment.

Variable capacitor

A variable capacitor is a capacitor whose capacitance may be intentionally and repeatedly changed mechanically or electronically. Variable capacitors are often used in L/C circuits to set the resonance frequency, e.g. to tune a radio (therefore it is sometimes called a tuning capacitor or tuning condenser), or as a variable reactance, e.g. for impedance matching in antenna tuners. In mechanically controlled variable capacitors, the distance between the plates, or the amount of plate surface area which overlaps, can be changed.

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