Micro 3D printing of a functional MEMS accelerometer

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3D printing of MEMS devices could enable the cost-efficient production of custom-designed and complex 3D MEMS for prototyping and for low-volume applications. In this work, we present the first micro 3D-printed functional MEMS accelerometers using two-phot ...

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Micro 3D printing of a functional MEMS accelerometer

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