Publications de Zheru Qiu | EPFL Graph Search

Ultrafast Tunable Photonic Integrated Extended-DBR Pockels Laser

Tobias Kippenberg, Andrey Voloshin, Anat Siddharth, Zheru Qiu

Hybrid photonic integrated lasers have revolutionized laser technology by combining the scalable manufacturing of simple laser diodes with high-performance features such as frequency stability, opticallinewidth, and tuning linearity [1], traditionally only ...

IEEE2025

Ultrafast tunable photonic-integrated extended-DBR Pockels laser

Tobias Kippenberg, Andrey Voloshin, Anat Siddharth, Zheru Qiu

Frequency-agile lasers that can simultaneously feature low noise characteristics and fast mode-hop-free frequency tuning are keystone components for applications ranging from LiDAR and distributed sensing to communication and quantum information processing ...

Nature Publishing Group2025

C- and L-band tunable integrated Erbium lasers via scalable manufacturing

Tobias Kippenberg, Grigorii Likhachev, Andrey Voloshin, Xinru Ji, Zheru Qiu

We demonstrate an integrated Erbium-based tunable laser using wafer-scale fabrication and ion implantation of silicon nitride photonic integrated circuits. We achieve single-frequency lasing tunable from 1530 nm to 1621 nm covering nearly the entire optica ...

Optica Publishing Group2025

High-Energy Mode-Locked Pulses from a Photonic Integrated Mamyshev Oscillator

Tobias Kippenberg, Grigorii Likhachev, Jianqi Hu, Xinru Ji, Zheru Qiu, Zihan Li

Mode-locked lasers (MLLs), capable of generating ultrashort coherent pulses, have been instrumental for numerous applications, including optical frequency metrology, eye surgery, machining, additive manufacturing, imaging and spectroscopy. However, commerc ...

IEEE2025

Octave-Spanning Kerr Frequency Comb in a Si3N4 Microresonator at Electronically Detectable Repetition Rate

Tobias Kippenberg, Miles Henry Anderson, Zheru Qiu, Alisa Davydova

A key challenge in microresonator-based frequency combs has been achieving f-2f self-referencing, which requires a powerful, octave-spanning microcomb. Stable self-referenced combs have numerous applications including ultra-low-noise microwave generation a ...

IEEE2025

Photonic substrate preparation method and photonic waveguide preparation or fabrication method

Tobias Kippenberg, Xinru Ji, Zheru Qiu

Photonic integrated circuit optical waveguide device preparation or fabrication method comprising providing a silicon substrate, depositing at least one copper gettering silicon nitride layer or material, depositing at least one optical waveguide cladding ...

2024

A fully hybrid integrated erbium-based laser

Rui Ning Wang, Tobias Kippenberg, Andrey Voloshin, Xinru Ji, Zheru Qiu, Andrea Bancora

Erbium-doped fibre lasers exhibit high coherence and low noise as required for fibre-optic sensing, gyroscopes, LiDAR and optical frequency metrology. Endowing erbium-based gain in photonic integrated circuits can provide a basis for miniaturizing low-nois ...

Nature Publishing Group2024

Foundry compatible, efficient wafer-scale manufacturing of ultra-low loss, high-density Si3N4 photonic integrated circuits

Rui Ning Wang, Tobias Kippenberg, Xinru Ji, Zheru Qiu

We demonstrate ultra-low propagation loss, lithographic precision, and wafer-scale manufacturing for high-density Si3N4 photonic integrated circuits using an efficient DUV-based subtractive approach. We show a propagation loss as low as 1.4 dB/m at 1.55 µm ...

Optical Society of America2024

Piezoelectrically tunable, narrow linewidth photonic integrated extended-DBR lasers

Tobias Kippenberg, Andrey Voloshin, Anat Siddharth, Zheru Qiu, Andrea Bancora, Junyin Zhang

Recent advancements in ultra-low-loss silicon nitride (Si3N4)-based photonic integrated circuits have surpassed fiber lasers in coherence and frequency agility. However, high manufacturing costs of DFB and precise control requirements, as required for self ...

Optica Publishing Group2024

Photonic-electronic integrated circuit-based coherent LiDAR engine

Edoardo Charbon, Tobias Kippenberg, Grigorii Likhachev, Andrey Voloshin, Anton Lukashchuk, Halil Kerim Yildirim, Xinru Ji, Zheru Qiu, Andrea Bancora

Chip-scale integration is a key enabler for the deployment of photonic technologies. Coherent laser ranging or FMCW LiDAR, a perception technology that benefits from instantaneous velocity and distance detection, eye-safe operation, long-range, and immunit ...

Nature Portfolio2024

Efficient mass manufacturing of high-density, ultra-low-loss Si3N4 photonic integrated circuits

Rui Ning Wang, Tobias Kippenberg, Xinru Ji, Zheru Qiu

Silicon nitride (Si3N4) photonic integrated circuits (PICs) offer significant advantages over traditional silicon photonics, including low loss and superior power handling at optical communication wavelength bands. To facilitate high-density integration an ...

2024

Hybrid integrated multi-lane erbium-doped Si3N4 waveguide amplifiers

Tobias Kippenberg, Xinru Ji, Zheru Qiu

We present the integration of four individual erbium-doped waveguide optical amplifiers on a Si3N4 photonic integrated circuit hybrid integrated with a four-lane semiconductor pump laser diode chip. Each amplifier achieves 15 dB on-chip gain. ...

Optical Society of America2024

Ultrafast Pockels-tunable hybrid integrated E-DBR laser

Tobias Kippenberg, Anat Siddharth, Zheru Qiu

We demonstrate a hybrid integrated frequency-agile laser based on an InP gain chip and an extended electro-optic Bragg waveguide reflector manufactured with a wafer-scale lithium niobate-on-insulator process featuring 10 GHz tuning range with high optical ...

Institute of Electrical and Electronics Engineers Inc.2024

Low-temperature and hydrogen-free silicon dioxide cladding for next-generation integrated photonics

Tobias Kippenberg, Xinru Ji, Anat Siddharth, Zheru Qiu, Zihan Li

We demonstrate a process for hydrogen-free low-loss silicon oxide (SiO2) films deposited using S iCl4 and O 2 as precursors. A wide low-loss window from 1260 nm to 1625 nm is achieved at a deposition temperature of 300 ◦C, essential for next generation pho ...

Optical Society of America2024

Large-Scale Photonic Chip Based Pulse Interleaver for Low-Noise Microwave Generation

Rui Ning Wang, Tobias Kippenberg, Xinru Ji, Zheru Qiu

We demonstrate a 64-times multiplication of a mode-locked laser’s 217 MHz pulse repetition rate to 14 GHz using an integrated Si3N4 interleaver. Six cascaded stages of Mach-Zehnder interferometers with up to 33 cm long optical delay lines are fully integra ...

Springer Science and Business Media Deutschland GmbH2024

Full C-band tunable integrated Erbium lasers via wafer-scale fabrication

Rui Ning Wang, Tobias Kippenberg, Xinru Ji, Anat Siddharth, Zheru Qiu

We demonstrate an integrated Erbium-based tunable laser using wafer-scale fabrication and ion implantation of silicon nitride photonic integrated circuits, and achieve single-frequency lasing tunable from 1530 nm to 1575 nm covering the entire optical C-ba ...

Institute of Electrical and Electronics Engineers Inc.2024

Hertz-linewidth, high-power, frequency-agile photonic integrated E-DBR laser

Tobias Kippenberg, Anat Siddharth, Zheru Qiu

We demonstrate hybrid integration of an RSOA with an extended-distributed Bragg reflector (E-DBR) laser cavity implemented on a Si3N4 chip with monolithically integrated piezoactuators. The laser exhibits intrinsic linewidth of 4 Hz with laser frequency tu ...

Optical Society of America2024

Probing the Formation of Nonlinear Optical States with Free Electrons

Rui Ning Wang, Tobias Kippenberg, Arslan Sajid Raja, Guanhao Huang, Alexey Tikan, Aleksandr Tusnin, Zheru Qiu, Yujia Yang

Combining nonlinear integrated photonics with electron microscopy, we probe the formation of optical dissipative structures in Si3N4 microresonators with free electrons and find unique spectral fingerprints in the electron spectrum that enable new electron ...

Institute of Electrical and Electronics Engineers Inc.2024

Ultrafast Tunable Photonic Integrated E-DBR Pockels Laser

Tobias Kippenberg, Anat Siddharth, Zheru Qiu

The hybrid integration of III-V gain media with low-loss photonic integrated circuits has advanced the performance of laser systems in terms of laser stability and coherence. The advent of lithium niobate on insulator (LNOI) photonics for self-injection lo ...

Springer Science and Business Media Deutschland GmbH2024

Coupling Free Electrons and Cavity Photons in a Transmission Electron Microscope

Rui Ning Wang, Tobias Kippenberg, Junqiu Liu, Arslan Sajid Raja, Guanhao Huang, Zheru Qiu, Yujia Yang

We couple free electrons to the optical modes of a photonic microring resonator. Inelastic electron scattering leads to the generation of cavity photons, correlated to the electrons in time and energy loss. ...

Institute of Electrical and Electronics Engineers Inc.2024