Publications de Teodoro Graziosi

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Microresonators are fundamental building blocks of any photonic integrated circuit, as they can be used as filters, modulators, sensors, and to enhance light emission. If these resonators are suspended and are free to oscillate, we can exploit the interact ...

We report on single crystal diamond micro-disk resonators fabricated in bulk chemical vapor deposition diamond plates (3 mm x 3 mm x 0.15 mm) using a combination of deep reactive ion etching and Focused Ion Beam (FIB) milling. The resulting structures are ...

We present a design for an analog phase shifter based on Silicon Photonic MEMS technology. The operation principle is based on a two-step parallel plate electrostatic actuation mechanism to bring a vertically movable suspended tapered waveguide in a first ...

We present a design for an on-chip MEMS-actuated Variable Optical Attenuator (VOA) based on Silicon Photonic MEMS technology. The VOA consists of 30 individual mechanically movable MEMS cantilevers, suspended over an integrated, 1 mu m wide bus waveguide, ...

We report on the increase in optical quality factor of a suspended single crystal diamond micro-disk resonator by thermal annealing. The resonators are fabricated by Deep Reactive Ion Etching (DRIE) to obtain circular pillars in bulk single crystal diamond ...

We demonstrate a novel method for fabricating single crystal diamond diffraction gratings based on crystallographic etching that yields high-quality diffraction gratings from commercially available diamond plates. Both V-groove and rectangular gratin ...

The present invention relates to a free-standing single crystalline diamond part and a single crystalline diamond part production method. The method includes the steps of: - providing a single crystalline diamond substrate or layer; - providing a first adh ...

The present invention concerns a layer or substrate flattening method comprising the steps of: - providing a layer or substrate (1) to be flattened; - measuring a topography or surface profile of at least one area (3) of the layer or substrate to be flatte ...

We propose a non-contact surface finishing method for brittle substrates by ion beam etching and we experimentally demonstrate polishing of (100) single crystal diamond surface. We model and simulate the polishing process, and verify the results experiment ...

The present invention concerns a single crystalline diamond optical element production method. The method includes the steps of: ‐ providing a single crystalline diamond substrate or layer; ‐ applying a mask layer to the single crystalline diamond substrat ...

The field of diamond photonics is reviewed, with a focus on recent experimental demonstrations of photonic integrated devices in a single crystal diamond. This field leverages the outstanding material properties of diamond with the aim to establish large-s ...

We demonstrate a die level release process for silicon photonic MEMS structures, that is compatible with dies from a standard silicon photonics foundry process which are only several square millimeters in size. ...

Polishing method comprising the steps of: - providing at least one crystalline layer or substrate, the at least one crystalline layer or substrate extending in at least one plane, and including at least one outer surface and at least one depression extendi ...

Teodoro Graziosi

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Fabrication and Characterization of Freestanding Single Crystal Diamond and Silicon Microresonators

Single crystal diamond micro-disk resonators by focused ion beam milling

Silicon Photonic MEMS Phase-Shifter

Silicon photonic MEMS variable optical attenuator

Enhancement of optical quality factor by thermal annealing of single crystal diamond micro-resonators

High-quality single crystal diamond diffraction gratings fabricated by crystallographic etching

Single crystalline diamond part production method for stand alone single crystalline mechanical and optical component production

Method for flattening substrates or layers using 3d printing and etching

Non-contact polishing of single crystal diamond by ion beam etching

Single crystalline diamond diffractive optical elements and method of fabricating the same

Integrated photonic devices in single crystal diamond

Die Level Release of Silicon Photonic MEMS

Reactive ion etching of single crystal diamond by inductively coupled plasma: State of the art and catalog of recipes

Non-contact polishing of a crystalline layer or substrate by ion beam etching