Publications de Annalisa De Pastina

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This PhD thesis aims at developing a system which can measure the mechanical properties of fluidic samples in the picoliter range. The ultimate goal is the characterization of cancer cells and viscoelastic fluids (i.e. biological fluids), in order to study ...

Calorimetry of single biological entities remains elusive. Suspended microchannel resonators (SMRs) offer excellent performance for real-time detection of various analytes and could hold the key to unlocking pico-calorimetry experiments. However, the typic ...

Ultrathin aluminum nitride (AlN) films are of great interest for integration into nanoelectromechanical systems for actuation and sensing. Given the direct relationship between crystallographic texture and piezoelectric (PZE) response, x-ray diffraction ha ...

Suspended nanochannel resonators (SNRs) are promising devices able to characterize mass down to the attogram scale, thus being able to detect nanoparticles or biomolecules. In this paper, we present a flexible fabrication process for SNRs based on a sacrif ...

Micro- and nano-electromechanical systems (M/NEMS) have demonstrated outstanding sensing capabilities down to the yoctogram (10(-24) g) scale in vacuum environment and cryogenic temperatures. In order to bring such extraordinary resolution levels into the ...

In a free ZY-LiNbO3 400nm thick platelet, narrow electrodes (500nm wide) placed periodically with a pitch of few micrometers can eXcite standing Bulk Acoustic shear wave Resonances (XBARs), by means of lateral electric field parallel to crystalline Y- axis ...

We report on the design and operation of a world-to-chip microfluidic interface and experimental setup for fluidic micro- and nano-electromechanical systems. The central component of the interface is an engineered polyether ether ketone connector that brin ...

In this paper we describe five different transduction techniques for the motion of NEMS resonators. We describe how these techniques differ from those used for MEMS and how centrosymmetric or amorphous materials can be used to fabricate NEMS. ...

Improving the quality factor (Q) of electromechanical resonators is of paramount importance for different applications, ranging from RF filtering to sensing. In this paper, we present a modified fabrication process flow for contour mode resonators to simul ...

This work presents the fabrication of a MEMS resonant device which addresses the need for high quality and miniaturized RF filters in the 3-6 GHz range for 5th generation (5G) mobile networks. The 4-mask fabrication process is based on the definition of in ...

Annalisa De Pastina

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PZE-transduced Suspended Microchannel Resonators for sensing applications

Avoiding transduction-induced heating in suspended microchannel resonators using piezoelectricity

Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN

Fabrication of clamped-clamped beam resonators with embedded fluidic nanochannel

Suspended micro/nano channel resonators: a review

Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters

Modular interface and experimental setup for in-vacuum operation of microfluidic devices

Piezoelectric Nanoelectromechanical Systems

Engineered acoustic mismatch for anchor loss control in contour mode resonators

Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters