Matthias Neuenschwander

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The field of micro electromechanical systems (MEMS) evolved from the microelectronic industry and the technologies developed to fabricate integrated circuits. As a result, MEMS are commonly fabricated on silicon wafers. The development of MEMS has been dri ...

Active microelectromechanical systems (MEMS) with integrated electronic sensing and actuation can provide fast and sensitive measurements of force, acceleration and biological analytes. Strain sensors integrated onto MEMS cantilevers are widely used to tra ...

Microcantilevers are popular transducers thanks to their simple design and a high sensitivity. In many applications, the cantilevers need to be actuated, either to induce a controlled deflection or to excite the resonance. This can be achieved with integra ...

Employing polymer cantilevers has shown to outperform using their silicon or silicon nitride analogues concerning the imaging speed of atomic force microscopy (AFM) in tapping mode (intermittent contact mode with amplitude modulation) by up to one order of ...

High-speed atomic force microscopy has thus far largely been limited to the use of small cantilevers in liquid, but the technique would greatly profit areas of nanotechnology that require the use of larger probes in air. We present polymer-based cantilever ...

Matthias Neuenschwander

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A new versatile hybrid MEMS technology for high sensitivity, fluid proof sensing applications

A polymer-semiconductor-ceramic cantilever for high-sensitivity fluidcompatible microelectromechanical systems

Fabrication of fluid-compatible trilayer cantilevers with integrated piezoelectric actuators

Integration of sharp silicon nitride tips into high-speed SU8 cantilevers in a batch fabrication process

Self-Actuated Polymer-Based Cantilevers With Sharp Silicon Tips For High-Speed Atomic Force Microscopy