Publications de Dimitrios Tsamados

MEMS Tunable Capacitor with Fragmented Electrodes and Rotational Electro-Thermal Drive

Mihai Adrian Ionescu, Alexander Mehdaoui, Dimitrios Tsamados

2007

MEMS Tunable Capacitor with laterally driven fragmented electrodes and electro-thermal actuation

Mihai Adrian Ionescu, Alexander Mehdaoui, Dimitrios Tsamados

2006

High tuning range AlSi RF MEMS capacitors fabricated with sacrificial amorphous silicon surface micromachining

Michel Declercq, Philippe Renaud, Catherine Dehollain, Raphaël Fritschi, Philippe Flückiger, Mihai Adrian Ionescu, Cyrille Hibert, Florin Udrea, Dimitrios Tsamados

This paper reports the fabrication and electrical characterization of high tuning range AlSi RF MEMS capacitors. We present experimental results obtained by a surface micromachining process that uses dry etching of sacrificial amorphous silicon to release ...

2004