Yannick Sébastien Fournier

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This thesis aimed at developing new 3D structuration techniques for a relatively recent new ceramic technology called LTCC, which stands for Low Temperature, Co-fired Ceramic. It is a material originally developed for the microelectronic packaging industry ...

This article describes the design and fabrication of a hermetic LTCC package for an optical MEMS chip designed for space applications. The package must ensure electrical and optical connections, mechanical positioning, atmosphere control, and finally low t ...

In this work a prototype of micro force sensor of range μN...mN is presented. Instead of the traditional piezoresistive strain sensing through thick-film resistors used for higher forces, a more effective principle is used: measurement of beam displacement ...

In this work, we present and analyse the flow-sensing part of a recently-developed multisensor in LTCC (low- temperature co-fired ceramic) technology; this device integrates flow / pressure / temperature sensing and is designed for diagnostics monitoring o ...

Ceramic technologies such as thick-film and LTCC (Low Temperature Cofired Ceramic) are excellent platforms for the fabrication of mesoscale devices such as sensors, actuators, microreactors and MEMS packaging. This work presents two alternative screen-prin ...

This paper presents a thermal flow sensor based on the calorimetric principle realized by using low temperature co-fired ceramic (LTCC) technology, where the tapes and flow channel have been structured by laser machining. A standard configuration of a calo ...

This paper presents the multiple set of requirements for the ITER magnetic diagnostic systems and the current status of the various R&D activities performed by the EU partners. ...

Yannick Sébastien Fournier

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3D Structuration Techniques of LTCC for Microsystems Applications

Hermetic package for optical MEMS

Capacitive micro force sensors manufactured with mineral sacrificial layers

Integrated SMD pressure/flow/temperature multisensor for compressed air in LTCC technology: Thermal flow and temperature sensing

Formulation and processing of screen-printing vehicles for sacrificial layers on thick-film and LTCC substrates

Integrated LTCC micro-fluidic modules - an SMT flow sensor

The Magnetic Diagnostic Set for ITER