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The fabrication, characterization and application of polyimide-based flexible microelectrodes for recording from and stimulation of biological tissue are described. The planar electrodes consist of a polyimide-platinum-polyimide sandwich structure with a t ...

The large majority of microelectromechanical systems (MEMS) are fabricated on silicon, glass or Pyrex substrates by manufacturing techniques, which originated from the semiconductors industry. However, their final application often requires removal of the ...

This paper describes the development of microelectrodes with integrated three-dimensional electrode structures. The integration of three-dimensional structures aims at an improvement of the electrode/tissue interface. Due to the increase in surface area the electrode impedance is reduced, while the density of microelectrodes per area remains the same as with flat electrodes. Two different types of electrodes have been developed: Flexible, implantable microelectrodes with pyramidal, protruding structures and

This paper reports on polyimide microfluidic devices fabricated by photolithography and a layer transfer lamination technology. The microchannels are sealed by laminating an uncured polyimide film on a partially cured layer and subsequent imidization. Sele ...

A new noninvasive approach for intraocular pressure (IOP) measurement allowing continuous monitoring over prolonged periods, regardless of patient's position and activities. The key element of this measurement method is a soft contact lens (1) including at least one strain gage (2) longitudinally arranged around the center of the contact lens and capable of measuring precisely spherical deformations of the eyeball induced by changes in IOP. This information is transmitted with wires or (preferably) wireless

We present a description of ion transport through geometrically defined nanoslits. The description was obtained through impedance spectroscopy measurements of electrolytes with different physico-chemical parameters. The number of 50 nm high nanoslits prese ...

The study of intracellular communication requires devices that can not only monitor the bioelectric activity, but also control and observe the biochemical environment at the cellular level. This paper reports on the development and characterisation of impl ...

This paper describes the fabrication of polyimide-based microelectrodes with embedded fluidic microchannels. The thin-film structures combine for the first time a fluidic system with microelectrodes for recording and stimulation of biological signals on a ...

This paper reports on the technology development and characterization of polyimide-based, microfluidic channels with integrated nanoporous membranes. A layer transfer and lamination technique is used to fabricate flexible microchannels from spin-on polyimi ...

The following paper describes a sacrificial layer method for the manufacturing of microfluidic devices in polyimide and SU-8. The technique uses heat-depolymerizable polycarbonates embedded in polyimide or SU-8 for the generation of microchannels and seale ...

Stefan Metz

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Fabrication and test of implantable thin-film electrodes for stimulation and recording of biological signals

Partial release and detachment of microfabricated metal and polymer structures by anodic metal dissolution

Microelectrodes with three-dimensional structures for improved neural interfacing

Polyimide microfluidic devices with integrated nanoporous filtration areas manufactured by micromachining and ion track technology

Intraocular pressure recording system

Ion transport through nanoslits investigated by impedance spectroscopy

Flexible polyimide probes with microelectrodes and embedded microfluidic channels for simultaneous drug delivery and multi-channel monitoring of bioelectric activity

Fabrication of flexible, implantable microelectrodes with embedded fluidic microchannels

Flexible microchannels with integrated nanoporous membranes for filtration and separation of molecules and particles

Polyimide and SU-8 microfluidic devices manufactured by heat- depolymerizable sacrificial material technique

On the Similarity of Electric Field Signatures of Upward and Downward Negative Leaders

Polyimide-based microfabrication technologies for microelectrodes and microfluidic devices in biomedical engineering

Composite photopolymer microstructures: From planar to 3D devices