Publications de Brahim Belgacem

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This paper describes fabrication and characterization results of piezoelectric micromachined ultrasonic transducers (pMUTs) based on 2-mu m-thick Pb(Zr0.53Ti0.47O3) (PZT) thin films. The applied structures are circular plates held at four bridges, thus par ...

Processing issues for the fabrication of capacitive micromachined ultrasonic transducer (cMUT) arrays have been studied using surface micromachining. This work focuses on the critical steps of process fabrication such as membrane formation, sacrificial layer properties and vacuum sealing performance of cavity. We describe a four-mask process for the realization of sealed cMUT. We demonstrate that the use of a sacrificial layer with a columnar structure gives a fast etching rate (29 nm s(-1)) in a buffered h

A micro power generator harvesting vibration energy by resonant inertial oscillation of a piezoelectric laminated cantilever with proof mass was designed, fabricated, and characterized. The active part with 2 pm thick PZT on 5 mu m silicon was equipped wit ...

Piezoelectric micromachined ultrasonic transducers comprising a 10 mu m thick Si device layer and a 14 pro thick piezoelectric PZT layer were investigated. The PZT films were deposited by a sol-gel technique. The transverse piezoelectric coefficient was me ...

Brahim Belgacem

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Piezoelectric micromachined ultrasonic transducers based on PZT thin films

Optimization of the fabrication of sealed capacitive transducers using surface micromachining

Vibration Energy Harvesting with PZT Micro Device

Thick PZT sol-gel films for pMUT transducers performances improvement

Shear mode coupling and tilted grain growth of AlN thin films in BAW resonators

Shear mode coupling and properties dispersion in 8 GHz range AlN thin film bulk acoustic wave (BAW) resonator

Piezoelectric micromachined ultrasonic transducers with thick PZT sol gel films