Publications de Nico de Rooij | EPFL Graph Search

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This works describes the fabrication process of an array of printed MEMS microbridges on polymeric foil, performed in only four easy steps. Each functional material was deposited exclusively by inkjet-printing technique, compatible with large-area fabricat ...

We present a portable microsystem to quantitatively detect cocaine in human saliva. In this system, we combine a microfluidic-based multiphase liquid-liquid extraction method to transfer cocaine continuously from IR-light-absorbing saliva to an IR-transparent solvent (tetrachloroethylene) with waveguide IR spectroscopy (QC-laser, waveguide, detector) to detect the cocaine on-chip. For the fabrication of the low-cost polymer microfluidic chips a simple rapid prototyping technique based on Scotch-tape masters

We report on the first ion-implanted dielectric electroactive polymer actuator that was successfully microfabricated and tested. Ion implantation is used to make the surface of the polymer locally conducting. Implanting the compliant electrodes solves the ...

We present a compact frequency-stabilized laser system locked to the Rubidium absorption line of a micro-fabricated reference cell. A printed circuit board (PCB) is used to carry all the components and part of the electronics, and low-temperature co-fired ...

A new design for a compact portable lab-on-a-chip instrument based on MCE and dual capacitively coupled contactless conductivity detection (dC4D) is described. The instrument is battery powered with total dimension of 14 x 25 x 8 cm3 (w x l x h), and weigh ...

This communication presents the modeling and the first demonstration of very large deformation balloon actuators based on pyrotechnics on chip. The gas and pressure generated by the combustion of a solid propellant stored in a micromachined cavity lead to the large deformation of the elastic membrane closing the cavity, forming a balloon with a radius of few millimeters. By combining the experimental data obtained on the mechanical properties of the elastic membrane and volume of gas generated per unit of m

This paper reports on energy harvesting from an impact by using a piezoelectric MEMS scavenger. Useful electrical power is generated by the impact of the rotating gear on the MEMS piezoelectric transducer. The design of the device structure was based on both analytical and FEM models for the estimation of induced voltage generated from piezoelectric transducer. A prototyping of piezoelectric MEMS based impact harvester consisting of a piezoelectric unimorph transducer was operated on a gearbox with a speed

The UV-curable adhesive NOA81 (Norland Optical Adhesive) is a promising liquid photopolymer for low-cost microfluidic chip production. Different fabrication methods for NOA81 are suggested [1,2]. However, optical characterization for fluorescent based detection systems is missing. We present a comparison of fluorescent emissionspectra of various NOA types as well as the time evolution of the spectra of the most promising one - NOA81. We report on a simple rapid prototyping technique to produce chips for flu

We report on inkjet printing of silver nanoparticles on paper for the design of resistive temperature and capacitive humidity sensors. Temperature and humidity have shown to have an influence on the electrical and mechanical properties of the Ag printed structures on paper. The passivation of the paper substrate and the Ag structures with parylene was investigated to reduce these effects and improve the stability of the structures. The lines were printed with an average thickness of 0.8 μm and a resistivity

Monitoring metabolism fluctuations inside a cell culture is a valuable method for assessment of the cells vitality. Enzyme-based biosensors can provide selective measurement of metabolites such as glucose, lactate, glutamate and choline. However, integration of these biosensors inside a cell culture is a challenging issue that can disrupt the properties of the cells microenvironment or influence the biosensors' enzyme functioning. Herein, a technique for measuring the abovementioned metabolites in a cell cu

This paper presents a complete wafer level microfabrication process for the production of unimorph MEMS energy harvesters based on bulk PZT. Recently, piezoelectric harvesters designed to take advantage of the high quality piezoelectric properties of bulk PZT have been fabricated using local placement and bonding of individual PZT pieces and large proof masses at the chip level. With the process presented here, 16 piezoelectric energy harvesters have been fabricated in parallel at the wafer level by bonding

We are developing MEMS-based programmable reflective slit masks for future generation infrared multi-object spectroscopy (MOS) for space and ground-based telescopes. These devices are composed of monocrystalline silicon micromirrors of size 200 x 100 um(2) which can be tilted by electrostatic actuation yielding a tilt-angle of 20 degrees. An electromechanical clamping mechanism has been demonstrated providing uniform tilt-angle within one arc minute precision over the whole array (5 x 5 micromirrors). Slit

Cell based biosensors are increasingly used as detection tools for tracing toxins in environmental samples. In such biosensors the reaction of cells cultivated in vitro is monitored upon exposing them to different samples. As the sample will be in close contact with living cells, controlling the sample properties, especially osmolarity, is necessary. Osmolarity difference across the cell membrane can lead to cell death upon exposure to the sample [1]. Herein, we present a microfluidic cartridge designed to

An optimized capacitively coupled contactless conductivity detector for microchip electophoresis is presented. The detector consists of a pair of top bottom excitation electrodes and a pair of pickup electrodes disposed onto a very thin plastic microfluidic chip The detection cell formed by the electrodes is completely encased and shielded in a metal housing These approaches allow for the enhancement of signal coupling and extraction from the detection cell that result in an improved signal-to-noise-ratio a

We demonstrate the ability to control the creation of self aligned nanostructures by e-beam lithography, where a central nanopillar with circular rim is created in a single e-beam exposure [1,2]. This characteristic shape is formed by the energy density distribution of incident, forwardscattered and backscattered electrons [3] and reflects the dual behavior of PMMA as positive and negative e-beam resist. In addition, the high energy incident electrons have a confined heating effect on the PMMA and carbonize

This paper presents a new fabrication method to manufacture alkali reference cells having dimensions larger than standard micromachined cells and smaller than glass-blown ones, for use in compact atomic devices such as vapour-cell atomic clocks or magnetom ...

The fabrication using silicon micromachining and characterization of an acoustic Lamb wave actuator is presented. The intended use of the device is for mass transport and sensor applications. The device consists of dual interdigitated transducers patterned on a thin-film composite membrane of silicon nitride, platinum, and a sol-gel-derived piezoelectric ceramic (PZT) thin film, The acoustic properties of the device are presented along with preliminary applications to mechanical transport and liquid deliver

This paper describes the fabrication technique for the realization a microfluidic flow cell to be integrated on a CMOS biosensor for DNA hybridization detection. The main element of the microfluidic system is made in polydimethylsiloxane (PDMS) elastomer and takes up an area of 5 mm(2). PDMS is cast against a silicon master patterned by Deep Reactive Ion Etching (DRIE) and then bonded on the chip by means of oxygen plasma activation. The micro channels patterned in the flow cell are connected with capillary

Biosensors often require detecting infinitesimal amount of species, thus their readout must be improved for highest sensitivity and best Signal-to-Noise ratio. We will present a simulation tool for piezoresistive strain sensors, which takes into account nonuniform current flow in e.g., a U-shaped piezoresistor, and calculates local resistivity changes based on the piezoresistive coefficients with corresponding directions. This simulation tool yields DR/R as a result. Thus a real piezoresistor layout, rather

A polymeric-based colorimetric gas sensor with its associated electronics targeting ammonia detectionat low-cost and low-power is presented. The gas sensitive layer was inkjet printed on a plastic foil used as an optical waveguide. The planarconfiguration ...

Nico de Rooij

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Large Arrays Of Inkjet-Printed Mems Microbridges On Foil

Microfluidic Droplet-Based Liquid–Liquid Extraction and On-Chip IR Spectroscopy Detection of Cocaine in Human Saliva

Microactuators based on ion-implanted dielectric Electroactive Polymer Membranes (EAP)

A miniature frequency-stabilized VCSEL system emitting at 795nm based on LTCC modules

A portable lab-on-a-chip instrument based on MCE with dual topbottom capacitive coupled contactless conductivity detector in replaceable cell cartridge

Large Deformation Balloon Micro-Actuator Based on Pyrotechnics on Chip

Energy harvesting from a rotating gear using an impact type piezoelectric MEMS scavenger

Microfluidic devices made of UV-curable glue (NOA81) for fluorescence detection based applications

Inkjet printing on paper for the realization of humidity and temperature sensors

Enzyme SU-8 microreactors: simple tools for cell-culture monitoring

Wafer Level Fabrication of Vibrational Energy Harvesters using Bulk PZT Sheets

Development of MEMS-based programmable slit mask for Multi-Object Spectroscopy

Sample preparation microfluidic cartridge for on-line adjustment of osmolarity in miniaturized cell-based analysis systems

Capacitively coupled contactless conductivity detection with dual top-bottom cell configuration for microchip electrophoresis

Self Aligned Concentric Nanostructures Formed by E-beam Overexposure of PMMA and Single Post Processing Steps

Microfabricated rubidium vapour cell with a thick glass core for small-scale atomic clock applications

Microfabricated Lamb wave device based on PZT sol-gel thin film for mechanical transport of solid particles and liquids

Integration of a microfluidic flow cell on a CMOS biosensor for DNA detection

Direct Piezoresistive Simulation Tool

Inkjet printed colorimetric ammonia sensor on plastic foil for low-cost and low-power devices