Séance de cours

Conception de miroirs MEMS avec Serpentine Springs

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Dans cours

MICRO-470: Scaling laws in micro & nanosystems

This class adresses scaling laws in MEMS/NEMS. The dominant physical effects and scaling effects when downsizing sensors and actuators in microsystems are discussed, across a broad range of actuation principles. ...

Description

Cette séance de cours couvre la conception et les défis des ressorts pliés (serpentine) dans les dispositifs MEMS, en se concentrant sur leur utilisation dans les applications de flexion et de torsion. L'instructeur présente des exemples de miroirs MEMS pour la connexion transversale optique, discutant de l'ingénierie des ressorts en silicium monocristallin pour la tolérance aux chocs et les modes de défaillance observés à différentes forces G.

Enseignant·e·s (3)

Philippe Renaud

Philippe Renaud is Professor at the Microsystem Laboratory (LMIS4) at EPFL. He is also the scientific director of the EPFL Center of MicroNanoTechnology (CMI). His main research area is related to micronano technologies in biomedical applications (BioMEMS) with emphasis on cell-chips, nanofluidics and bioelectronics. Ph. Renaud is invloved in many scientifics papers in his research area. He received his diploma in physics from the University of Neuchâtel (1983) and his Ph.D. degree from the University of Lausanne (1988). He was postdoctoral fellow at University of California, Berkeley (1988-89) and then at the IBM Zürich Research Laboratory in Switzerland (1990-91). In 1992, he joined the Sensors and Actuators group of the Swiss Center for Electronics and Microtechnology (CSEM) at Neuchâtel, Switzerland. He was appointed assistant professor at EPFL in 1994 and full professor in 1997. In summer 1996, he was visiting professor at the Tohoku University, Japan. Ph. Renaud is active in several scientific committee (scientific journals, international conferences, scientific advisory boards of companies, PhD thesis committee). He is also co-founder of the Nanotech-Montreux conference. Ph. Renaud is committed to valorization of basic research through his involvement in several high-tech start-up companies.

Niels Quack

Prof. Dr. Niels Quack received the M.Sc. degree from Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland, in 2005, and the Dr.Sc. degree from Eidgenössische Technische Hochschule Zürich (ETH), Zürich, Switzerland, in 2010. From 2011 to 2015, he was Postdoctoral Researcher and Visiting Scholar with the Integrated Photonics Laboratory, Berkeley Sensor and Actuator Center, University of California, Berkeley, CA, USA. From 2014 to 2015, he was Senior MEMS Engineer with Sercalo Microtechnology, Neuchâtel, Switzerland. He is currently an SNSF Assistant Professor with Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland. He has authored and co-authored more than 50 papers in leading technical journals and conferences. His research interests include photonic micro and nanosystems, with an emphasis on diamond photonics and silicon photonic MEMS. He is Steering Committee Member of the IEEE International Conference on Optical MEMS and Nanophotonics (OMN) and served as General Chair of the IEEE OMN 2018 and the Latsis Symposium 2019 on Diamond Photonics. He is a Senior Member of IEEE, Member of The Optical Society (OSA) and life member of SPIE.

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Concepts associés (7)

Engineering design process

The engineering design process, also known as the engineering method, is a common series of steps that engineers use in creating functional products and processes. The process is highly iterative - parts of the process often need to be repeated many times before another can be entered - though the part(s) that get iterated and the number of such cycles in any given project may vary. It is a decision making process (often iterative) in which the basic sciences, mathematics, and engineering sciences are applied to convert resources optimally to meet a stated objective.

Ingénierie des systèmes

L'ingénierie des systèmes ou ingénierie système est une approche scientifique interdisciplinaire, dont le but est de formaliser et d'appréhender la conception et la validation de systèmes complexes. L'ingénierie des systèmes a pour objectif de maîtriser et de contrôler la conception de systèmes dont la complexité ne permet pas le pilotage simple. Par système, on entend un ensemble d'éléments humains ou matériels en interdépendance les uns les autres et qui inter-opèrent à l'intérieur de frontières ouvertes ou non sur l'environnement.

Engineering management

Engineering management is the application of the practice of management to the practice of engineering. Engineering management is a career that brings together the technological problem-solving ability of engineering and the organizational, administrative, legal and planning abilities of management in order to oversee the operational performance of complex engineering-driven enterprises. A Master of Engineering Management (MEM) is sometimes compared to a Master of Business Administration (MBA) for professionals seeking a graduate degree as a qualifying credential for a career in engineering management.

Monocrystalline silicon

Monocrystalline silicon, more often called single-crystal silicon, in short mono c-Si or mono-Si, is the base material for silicon-based discrete components and integrated circuits used in virtually all modern electronic equipment. Mono-Si also serves as a photovoltaic, light-absorbing material in the manufacture of solar cells. It consists of silicon in which the crystal lattice of the entire solid is continuous, unbroken to its edges, and free of any grain boundaries (i.e. a single crystal).

Silicium polycristallin

Le silicium polycristallin, aussi couramment appelé polysilicium ou poly-Si est une forme particulière du silicium, qui se différencie du silicium monocristallin et du silicium amorphe. Contrairement au premier (composé d'un seul cristal) et au second (n'ayant aucune ou une très faible cohérence cristallographique), le silicium polycristallin est constitué de multiples petits cristaux de tailles et de formes variées, qui lui confèrent des propriétés différentes des deux autres formes.

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Concepts associés (7)

Engineering design process

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