Microtechnique

Micro 3D printing of a functional MEMS accelerometer

Luis Guillermo Villanueva Torrijo, Damien Maillard

Microelectromechanical system (MEMS) devices, such as accelerometers, are widely used across industries, including the automotive, consumer electronics, and medical industries. MEMS are efficiently produced at very high volumes using large-scale semiconduc ...

SPRINGERNATURE2022

Ion beam etching redeposition for 3D multimaterial nanostructure manufacturing

Philippe Renaud, Arnaud Bertsch, Benoît Xavier Emmanuel Desbiolles

A novel fabrication method based on the local sputtering of photoresist sidewalls during ion beam etching is presented. This method allows for the manufacture of three-dimensional multimaterial nanostructures at the wafer scale in only four process steps. ...

2019

On the micrometre precise mould filling of liquid polymer derived ceramic precursor for 300-µm-thick high aspect ratio ceramic MEMS

Jürgen Brugger, Rosario Maurizio Gullo, Jonas Grossenbacher

This paper describes a novel and scalable method for the fabrication of polymer derived ceramics (PDC) structures with high aspect ratio and micrometre scale features. Elastomeric micro-moulds composed of a filling pot are used to deliver via sacrificial m ...

Elsevier2015

Study of bending reliability and electrical properties of platinum lines on flexible polyimide substrates

Nico de Rooij, Danick Briand, Francisco Molina Lopez, Jérôme Courbat

We have experimentally studied the variation in electrical resistance of flexible platinum lines patterned on polyimide foil when they are subjected to circular bending constraints. The lines were patterned by means of standard photolithography and sputter ...

Elsevier2014

100 mm dynamic stencils pattern sub-micrometre structures

Jürgen Brugger, Andreea Veronica Savu, Shenqi Xie

Dynamic stencil lithography uses a moving shadow-mask to draw patterns by having directionally evaporated material deposited through the stencil apertures onto the substrate. Sub-micrometre, two- dimensional patterning is demonstrated at full 100 mm wafer ...

2011

Focussed ion beam based fabrication of micro-electro-mechanical resonators

Mihai Adrian Ionescu, Nicoleta-Diana Ciressan

A simple and fast process to fabricate micro-electro-mechanical (MEM) resonators with deep sub-micron transduction gaps in thin SOI is presented. The proposed process is realized on both 350 nm and 1.5 μm thin silicon-on-insulator (SOI) substrates, evaluat ...

Springer-Verlag2008

Fabrication of metallic patterns by microstencil lithography on polymer surfaces suitable as microelectrodes in integrated microfluidic systems

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart, Nao Takano

Microstencil lithography, i.e. local deposition of micrometer scale patterns through small shadow masks, is a promising method for metal micropattern definition on polymer substrates that cannot be structured using organic-solvent-based photoresist technol ...

2006