This course introduces advanced fabrication methods enabling the manufacturing of novel micro- and nanosystems (NEMS/MEMS). Both top-down techniques (lithography, stenciling, scanning probes, additive techniques) and bottom-up approaches (self-assembly) ar ...
Students will learn about understanding the fundamentals and applications of emerging nanoscale devices, materials
and concepts. Remark: at least 5 students should be enrolled for the course to be given ...
The goal of this practical work is to create thermal micro-actuators consisting of micro-cantilevers made out of silicon dioxide and covered by chromium meander-shaped electrical tracks and contact pads. ...
In depth analysis of the operation principles and technology of advanced micro- and nanosystems. Familiarisation to their implementation into products and their applications. ...
Students will learn simple theoretical models, the theoretical background of finite element modeling as well as its application to modeling charge, mass and heat transport in electronic, fluidic and e