Microactuators based on ion-implanted dielectric Electroactive Polymer Membranes (EAP)

We report on the first ion-implanted dielectric electroactive polymer actuator that was successfully microfabricated and tested. Ion implantation is used to make the surface of the polymer locally conducting. Implanting the compliant electrodes solves the problem of how to microfabricate patterned electrodes having elasticity close to that of the insulating elastomer. Dieletric EAP actuators combine in an exceptional way high energy-density, while allowing large amplitude displacements [1,2]. The ion-implant approach avoids the deposition of metal electrodes on the polymer, normally accompanied with an undesired stiffening of the membrane. The actuator consists of a 35-um thick ion implanted PDMS membrane bonded to a silicon chip containing a hole. We observed 110-um vertical displacements of a square membrane measuring 1 mm2. ©2005 IEEE.