Publication

ALL TUNGSTEN AFM CANTILEVER WITH < 40 NANOMETRE PYRAMIDAL TIP

2005
Reports

Abstract

We develop wear resistant, electrically conducting AFM probes. Here, we describe a new AFM probe made entirely out of tungsten (W). The fabrication involves microfabrication techniques such as surface moulding, thin-film structuring of tungsten and high aspectratio SU-8 patterning. The metallic cantilever and tip are attached to a SU-8 photopolymer body. The free-standing 500-nm-thick cantilevers are obtained by a wafer-through etching. Figure 2 shows a SEM image of the SU-8 body with W cantilevers and a close-up of a W tip having a radius < 40 nm. The 200-μm-thick SU-8 body is 1.8 x 3.2 mm. Cantilever resonance frequencies range between 35 kHz and 1 MHz as measured by optical interferometry, which corresponds well to theoretical values assuming Ew= 410 MPa, ρw= 19.3 g/cm3. The AFM probes have been designed for conducting mode imaging at the nanoscale whereas W has been chosen for its excellent properties in electrical conductivity and wear. First characterisation has demonstrated AFM imaging capability.

Official source

https://infoscience.epfl.ch/entities/publication/ffa4c478-9a90-484f-a41e-3d395e17f373

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2005
Reports

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/ffa4c478-9a90-484f-a41e-3d395e17f373

About this result

Related concepts (32)

Atomic force microscopy

Atomic force microscopy (AFM) or scanning force microscopy (SFM) is a very-high-resolution type of scanning probe microscopy (SPM), with demonstrated resolution on the order of fractions of a nanometer, more than 1000 times better than the optical diffraction limit. Atomic force microscopy (AFM) is a type of scanning probe microscopy (SPM), with demonstrated resolution on the order of fractions of a nanometer, more than 1000 times better than the optical diffraction limit.

Kelvin probe force microscope

Kelvin probe force microscopy (KPFM), also known as surface potential microscopy, is a noncontact variant of atomic force microscopy (AFM). By raster scanning in the x,y plane the work function of the sample can be locally mapped for correlation with sample features. When there is little or no magnification, this approach can be described as using a scanning Kelvin probe (SKP). These techniques are predominantly used to measure corrosion and coatings. With KPFM, the work function of surfaces can be observed at atomic or molecular scales.

Scanning probe microscopy

Scanning probe microscopy (SPM) is a branch of microscopy that forms images of surfaces using a physical probe that scans the specimen. SPM was founded in 1981, with the invention of the scanning tunneling microscope, an instrument for imaging surfaces at the atomic level. The first successful scanning tunneling microscope experiment was done by Gerd Binnig and Heinrich Rohrer. The key to their success was using a feedback loop to regulate gap distance between the sample and the probe.

Related publications (1)

ALL TUNGSTEN AFM CANTILEVER WITH < 40 NANOMETRE PYRAMIDAL TIP

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Full-wafer stencils fabricated by a DUV/MEMS process for high-throughput patterning of mesoscopic structures