Publication

Ion-implanted compliant electrodes for mm-size dielectric elastomer actuators

Samuel Rosset
2009
Conference Papers

Abstract

The miniaturization of dielectric elastomer actuators requires compliant electrodes that are clean, reliable, and that can be easily patterned on a mm or μm scale. Carbon-based electrodes, which are commonly used to make large-scale actuators, are not well suited for this application. Metal ion implantation at low energies has, on the other hand, the ability to create compliant and patternable electrode through the creation of nanometer scale clusters in the first tens of nanometers below the elastomer surface. We present the mechanical and electrical properties of metal (Au, Pd, Ti, Cu) implanted electrodes on polydimethylsiloxane, as well as the application of Au-implanted electrode to the fabrication of small-size (∅1.5−3 mm) diaphragm actuators that exhibit vertical displacements up to 25% of their diameter.

Official source

https://infoscience.epfl.ch/entities/publication/fd40f8bc-f1f0-4e2c-a706-09e0f0047da3

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Samuel Rosset
2009
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/fd40f8bc-f1f0-4e2c-a706-09e0f0047da3

About this result

Related concepts (32)

Ion implantation

Ion implantation is a low-temperature process by which ions of one element are accelerated into a solid target, thereby changing the physical, chemical, or electrical properties of the target. Ion implantation is used in semiconductor device fabrication and in metal finishing, as well as in materials science research. The ions can alter the elemental composition of the target (if the ions differ in composition from the target) if they stop and remain in the target.

Metal

A metal (from Ancient Greek μέταλλον métallon 'mine, quarry, metal') is a material that, when freshly prepared, polished, or fractured, shows a lustrous appearance, and conducts electricity and heat relatively well. Metals are typically ductile (can be drawn into wires) and malleable (they can be hammered into thin sheets). These properties are the result of the metallic bond between the atoms or molecules of the metal. A metal may be a chemical element such as iron; an alloy such as stainless steel; or a molecular compound such as polymeric sulfur nitride.

Nanocluster

Nanoclusters are atomically precise, crystalline materials most often existing on the 0-2 nanometer scale. They are often considered kinetically stable intermediates that form during the synthesis of comparatively larger materials such as semiconductor and metallic nanocrystals. The majority of research conducted to study nanoclusters has focused on characterizing their crystal structures and understanding their role in the nucleation and growth mechanisms of larger materials.