Publication

Interferometric Measurement on a Nanometric Length Scale

Hans Peter Herzig, Toralf Scharf, Myun Sik Kim
2008
Conference Papers

Abstract

We investigate a measurement technique based on High Resolution Interference Microscopy (HRIM). HRIM allows the characterization of amplitude and phase of electromagnetic wave-fields in the far-field with a spatial accuracy that corresponds to a few nanometers in the object plane. The experimental tool working in transmission with a resolution of 20 nm in the object plane was presented in our previous work [1]. The accurate measurement of the optical characteristics below the classical resolution limit will be discussed.

Official source

https://infoscience.epfl.ch/entities/publication/f9cc1733-91da-446e-9b82-22e643a245ff

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Interferometric Measurement on a Nanometric Length Scale

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