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Publication

Interferometric Measurement on a Nanometric Length Scale

Hans Peter Herzig, Toralf Scharf, Myun Sik Kim
2008
Conference Papers

Abstract

We investigate a measurement technique based on High Resolution Interference Microscopy (HRIM). HRIM allows the characterization of amplitude and phase of electromagnetic wave-fields in the far-field with a spatial accuracy that corresponds to a few nanometers in the object plane. The experimental tool working in transmission with a resolution of 20 nm in the object plane was presented in our previous work [1]. The accurate measurement of the optical characteristics below the classical resolution limit will be discussed.

Official source

https://infoscience.epfl.ch/entities/publication/f9cc1733-91da-446e-9b82-22e643a245ff

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Hans Peter Herzig, Toralf Scharf, Myun Sik Kim
2008
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/f9cc1733-91da-446e-9b82-22e643a245ff

About this result

Related concepts (20)

Near-field scanning optical microscope

Near-field scanning optical microscopy (NSOM) or scanning near-field optical microscopy (SNOM) is a microscopy technique for nanostructure investigation that breaks the far field resolution limit by exploiting the properties of evanescent waves. In SNOM, the excitation laser light is focused through an aperture with a diameter smaller than the excitation wavelength, resulting in an evanescent field (or near-field) on the far side of the aperture.

Electromagnetic field

An electromagnetic field (also EM field or EMF) is a classical (i.e. non-quantum) field produced by moving electric charges. It is the field described by classical electrodynamics (a classical field theory) and is the classical counterpart to the quantized electromagnetic field tensor in quantum electrodynamics (a quantum field theory). The electromagnetic field propagates at the speed of light (in fact, this field can be identified as light) and interacts with charges and currents.

Microscopy

Microscopy is the technical field of using microscopes to view objects and areas of objects that cannot be seen with the naked eye (objects that are not within the resolution range of the normal eye). There are three well-known branches of microscopy: optical, electron, and scanning probe microscopy, along with the emerging field of X-ray microscopy. Optical microscopy and electron microscopy involve the diffraction, reflection, or refraction of electromagnetic radiation/electron beams interacting with the specimen, and the collection of the scattered radiation or another signal in order to create an image.

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