Publication

High-precision flexure-based XY-stage with high stiffness and load capacity

Simon Nessim Henein, Charles Baur, Hubert Pierre-Marie Benoît Schneegans, Patrick Robert Flückiger, Simon Hubert Prêcheur-Llarena
2024

Abstract

Typical flexure-based XY-stages have a serial design, and their layout results in the flexures being loaded in flection in face of heavy payloads or vertical loads. This paper presents a design with zero parasitic shift in which all flexures are loaded in traction/compression, resulting in a high-precision and high-load-capacity flexure-based XY-stage. A proof-of-concept demonstrator validates the concept and numerical simulations indicates sub-micron straightness error.

Official source

https://infoscience.epfl.ch/entities/publication/f17bd4ac-d3b9-4e0d-908d-11b1cf1b6fc4

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High-precision flexure-based XY-stage with high stiffness and load capacity

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