Publication

Waveguide Fabrication Method

Tobias Kippenberg, Martin Hubert Peter Pfeiffer, Arne Kordts
2016
Patents

Abstract

A waveguide fabrication method including the steps of providing a substrate including at least one waveguide recess structure and a stress release recess structure for receiving a waveguide material, and depositing the waveguide material onto the substrate and into both the waveguide recess structure and the stress release recess structure.

Official source

https://infoscience.epfl.ch/entities/publication/f155736e-49fc-4714-b71f-f77efdf3f09e

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Waveguide Fabrication Method

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