Publication
A waveguide fabrication method including the steps of providing a substrate including at least one waveguide recess structure and a stress release recess structure for receiving a waveguide material, and depositing the waveguide material onto the substrate and into both the waveguide recess structure and the stress release recess structure.
Romain Christophe Rémy Fleury, Jalaledin Tayebpour, Amir Jafargholi
Tobias Kippenberg, Xinru Ji, Yang Liu, Zheru Qiu