Publication

Compact low loss MEMS phase shifters for scalable field-programmable silicon photonics

Niels Quack, Alain Yuji Takabayashi, Hamed Sattari
2020
Conference Papers

Abstract

MEMS offer low power tunability to silicon photonics. However, reported phase shifters lack in range, IL, or linearity. We show pi linear phase shift in compact, 0.2 dB-IL MEMS devices, and demonstrate trade-offs for scalability. (C) 2020 The Author(s)

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Compact low loss MEMS phase shifters for scalable field-programmable silicon photonics

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