Publication

Plasma diagnostics as a tool for process optimization: the case of microcrystalline silicon deposition

2007
Conference Papers

Abstract

Properties of thin films such as the crystallinity of silicon deposited from SiH4 - H-2 discharges are governed by the plasma composition. Therefore, it is crucial to measure the plasma composition in order to understand and optimize the deposition rate, deposition efficiency and material quality of thin film deposition, such as for microcrystalline silicon, which is a key material for silicon thin film photovoltaic solar cells. This task can be performed by using Fourier transform infrared absorption spectroscopy or optical emission spectroscopy. This work compares these two techniques and shows their range of applicability and their limitations.

Official source

https://infoscience.epfl.ch/entities/publication/eb24cbff-1aa3-4ebe-b8c6-4d0a25ecf590

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2007
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/eb24cbff-1aa3-4ebe-b8c6-4d0a25ecf590

About this result

Related concepts (32)

Crystalline silicon

Crystalline silicon or (c-Si) Is the crystalline forms of silicon, either polycrystalline silicon (poly-Si, consisting of small crystals), or monocrystalline silicon (mono-Si, a continuous crystal). Crystalline silicon is the dominant semiconducting material used in photovoltaic technology for the production of solar cells. These cells are assembled into solar panels as part of a photovoltaic system to generate solar power from sunlight. In electronics, crystalline silicon is typically the monocrystalline form of silicon, and is used for producing microchips.

Amorphous silicon

Amorphous silicon (a-Si) is the non-crystalline form of silicon used for solar cells and thin-film transistors in LCDs. Used as semiconductor material for a-Si solar cells, or thin-film silicon solar cells, it is deposited in thin films onto a variety of flexible substrates, such as glass, metal and plastic. Amorphous silicon cells generally feature low efficiency.

Thin-film solar cell

Thin-film solar cells are made by depositing one or more thin layers (thin films or TFs) of photovoltaic material onto a substrate, such as glass, plastic or metal. Thin-film solar cells are typically a few nanometers (nm) to a few microns (μm) thick–much thinner than the wafers used in conventional crystalline silicon (c-Si) based solar cells, which can be up to 200 μm thick. Thin-film solar cells are commercially used in several technologies, including cadmium telluride (CdTe), copper indium gallium diselenide (CIGS), and amorphous thin-film silicon (a-Si, TF-Si).

Related publications (16)

Plasma diagnostics as a tool for process optimization: the case of microcrystalline silicon deposition

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