Correlation between anionic substitution and structural properties in AlCr(OxN1-x) coatings deposited by lateral rotating cathode arc PVD

The influence of oxygen content on the properties of cathodic arc-deposited AlCr(OxN1-x) coatings has been studied. All samples were prepared in a nitrogen-rich mixture of N-2 and O-2 at 550 degrees C using lateral rotating arc cathodes (LARC) technology together with a pulsed bias voltage. The obtained coatings were characterized by various techniques including XRD, EPMA, TEM, pin-on-disk wear tests and nanoindentation. The results obtained allow to classify the coatings into three groups with respect to their microstructure, mechanical properties and oxygen content, x. For the first group of samples with x