Publication

Microscopic four-point probe (u4PP) based on SU-8 cantilevers

Giovanni Boero
2005
Talks

Abstract

Four-point probes (4PPs) are used for the resistivity measurement of thin metal or semiconductor films. There is an interest in miniaturization of 4PPs to obtain higher surface sensitivity, increased spatial resolution and less damage to the sample. Several attempts have been made to reduce the probe spacing, e.g. a four-tip scanning tunneling microscope (STM) was reported and a 4PP based on silicon cantilevers was designed. This paper shows design, fabrication and characterisation of a micrometer scale 4PP (micro4PP) device based on SU-8-cantilevers. The photoresist SU-8 has appropriate mechanical properties that make it an excellent candidate material for active parts in selecterd micro-mechanical applications such as cantilevers for scanning probe methods.

Official source

https://infoscience.epfl.ch/entities/publication/e4509b92-c8a0-4390-8f0e-7d2d1c4cfd12

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Giovanni Boero
2005
Talks

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/e4509b92-c8a0-4390-8f0e-7d2d1c4cfd12

About this result

Related concepts (32)

Scanning probe microscopy

Scanning probe microscopy (SPM) is a branch of microscopy that forms images of surfaces using a physical probe that scans the specimen. SPM was founded in 1981, with the invention of the scanning tunneling microscope, an instrument for imaging surfaces at the atomic level. The first successful scanning tunneling microscope experiment was done by Gerd Binnig and Heinrich Rohrer. The key to their success was using a feedback loop to regulate gap distance between the sample and the probe.

Atomic force microscopy

Atomic force microscopy (AFM) or scanning force microscopy (SFM) is a very-high-resolution type of scanning probe microscopy (SPM), with demonstrated resolution on the order of fractions of a nanometer, more than 1000 times better than the optical diffraction limit. Atomic force microscopy (AFM) is a type of scanning probe microscopy (SPM), with demonstrated resolution on the order of fractions of a nanometer, more than 1000 times better than the optical diffraction limit.

Scanning tunneling microscope

A scanning tunneling microscope (STM) is a type of microscope used for imaging surfaces at the atomic level. Its development in 1981 earned its inventors, Gerd Binnig and Heinrich Rohrer, then at IBM Zürich, the Nobel Prize in Physics in 1986. STM senses the surface by using an extremely sharp conducting tip that can distinguish features smaller than 0.1 nm with a 0.01 nm (10 pm) depth resolution. This means that individual atoms can routinely be imaged and manipulated.

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Microscopic four-point probe (u4PP) based on SU-8 cantilevers

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