MEMSMEMS (Microelectromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components between 1 and 100 micrometres in size (i.e., 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres to a millimetre (i.e., 0.02 to 1.0 mm), although components arranged in arrays (e.g., digital micromirror devices) can be more than 1000 mm2.
MicrofabricationMicrofabrication is the process of fabricating miniature structures of micrometre scales and smaller. Historically, the earliest microfabrication processes were used for integrated circuit fabrication, also known as "semiconductor manufacturing" or "semiconductor device fabrication". In the last two decades microelectromechanical systems (MEMS), microsystems (European usage), micromachines (Japanese terminology) and their subfields, microfluidics/lab-on-a-chip, optical MEMS (also called MOEMS), RF MEMS, PowerMEMS, BioMEMS and their extension into nanoscale (for example NEMS, for nano electro mechanical systems) have re-used, adapted or extended microfabrication methods.
Etching (microfabrication)Etching is used in microfabrication to chemically remove layers from the surface of a wafer during manufacturing. Etching is a critically important process module, and every wafer undergoes many etching steps before it is complete. For many etch steps, part of the wafer is protected from the etchant by a "masking" material which resists etching. In some cases, the masking material is a photoresist which has been patterned using photolithography. Other situations require a more durable mask, such as silicon nitride.
Powder metallurgyPowder metallurgy (PM) is a term covering a wide range of ways in which materials or components are made from metal powders. PM processes can reduce or eliminate the need for subtractive processes in manufacturing, lowering material losses and reducing the cost of the final product. Powder metallurgy is also used to make unique materials impossible to get from melting or forming in other ways. A very important product of this type is tungsten carbide.
GyroscopeA gyroscope (from Ancient Greek γῦρος gŷros, "round" and σκοπέω skopéō, "to look") is a device used for measuring or maintaining orientation and angular velocity. It is a spinning wheel or disc in which the axis of rotation (spin axis) is free to assume any orientation by itself. When rotating, the orientation of this axis is unaffected by tilting or rotation of the mounting, according to the conservation of angular momentum.
Vibrating structure gyroscopeA vibrating structure gyroscope, defined by the IEEE as a Coriolis vibratory gyroscope (CVG), is a gyroscope that uses a vibrating structure to determine the rate of rotation. A vibrating structure gyroscope functions much like the halteres of flies (insects in the order Diptera). The underlying physical principle is that a vibrating object tends to continue vibrating in the same plane even if its support rotates. The Coriolis effect causes the object to exert a force on its support, and by measuring this force the rate of rotation can be determined.
GunpowderGunpowder, also commonly known as black powder to distinguish it from modern smokeless powder, is the earliest known chemical explosive. It consists of a mixture of sulfur, carbon (in the form of charcoal) and potassium nitrate (saltpeter). The sulfur and carbon act as fuels while the saltpeter is an oxidizer. Gunpowder has been widely used as a propellant in firearms, artillery, rocketry, and pyrotechnics, including use as a blasting agent for explosives in quarrying, mining, building pipelines and road building.
TechnologyTechnology is the application of knowledge for achieving practical goals in a reproducible way. The word technology can also mean the products resulting from such efforts, including both tangible tools such as utensils or machines, and intangible ones such as software. Technology plays a critical role in science, engineering, and everyday life. Technological advancements have led to significant changes in society.
Inertial navigation systemAn inertial navigation system (INS) is a navigation device that uses motion sensors (accelerometers), rotation sensors (gyroscopes) and a computer to continuously calculate by dead reckoning the position, the orientation, and the velocity (direction and speed of movement) of a moving object without the need for external references. Often the inertial sensors are supplemented by a barometric altimeter and sometimes by magnetic sensors (magnetometers) and/or speed measuring devices.
Cell (biology)The cell is the basic structural and functional unit of all forms of life. Every cell consists of cytoplasm enclosed within a membrane, and contains many macromolecules such as proteins, DNA and RNA, as well as many small molecules of nutrients and metabolites. The term comes from the Latin word cellula meaning 'small room'. Cells can acquire specified function and carry out various tasks within the cell such as replication, DNA repair, protein synthesis, and motility. Cells are capable of specialization and mobility within the cell.
Impact eventAn impact event is a collision between astronomical objects causing measurable effects. Impact events have physical consequences and have been found to regularly occur in planetary systems, though the most frequent involve asteroids, comets or meteoroids and have minimal effect. When large objects impact terrestrial planets such as the Earth, there can be significant physical and biospheric consequences, though atmospheres mitigate many surface impacts through atmospheric entry.
ErosionErosion is the action of surface processes (such as water flow or wind) that removes soil, rock, or dissolved material from one location on the Earth's crust and then transports it to another location where it is deposited. Erosion is distinct from weathering which involves no movement. Removal of rock or soil as clastic sediment is referred to as physical or mechanical erosion; this contrasts with chemical erosion, where soil or rock material is removed from an area by dissolution.
Cell theoryIn biology, cell theory is a scientific theory first formulated in the mid-nineteenth century, that organisms are made up of cells, that they are the basic structural/organizational unit of all organisms, and that all cells come from pre-existing cells. Cells are the basic unit of structure in all organisms and also the basic unit of reproduction. The three tenets of the cell theory are: All organisms are composed of one or more cells. The cell is the basic unit of structure and organization in organisms.
Plant cellPlant cells are the cells present in green plants, photosynthetic eukaryotes of the kingdom Plantae. Their distinctive features include primary cell walls containing cellulose, hemicelluloses and pectin, the presence of plastids with the capability to perform photosynthesis and store starch, a large vacuole that regulates turgor pressure, the absence of flagella or centrioles, except in the gametes, and a unique method of cell division involving the formation of a cell plate or phragmoplast that separates the new daughter cells.
Cell biologyCell biology (also cellular biology or cytology) is a branch of biology that studies the structure, function, and behavior of cells. All living organisms are made of cells. A cell is the basic unit of life that is responsible for the living and functioning of organisms. Cell biology is the study of the structural and functional units of cells. Cell biology encompasses both prokaryotic and eukaryotic cells and has many subtopics which may include the study of cell metabolism, cell communication, cell cycle, biochemistry, and cell composition.
Impact craterAn impact crater is a circular depression in the surface of a solid astronomical object formed by the hypervelocity impact of a smaller object. In contrast to volcanic craters, which result from explosion or internal collapse, impact craters typically have raised rims and floors that are lower in elevation than the surrounding terrain. Lunar impact craters range from microscopic craters on lunar rocks returned by the Apollo program and small, simple, bowl-shaped depressions in the lunar regolith to large, complex, multi-ringed impact basins.
Wafer (electronics)In electronics, a wafer (also called a slice or substrate) is a thin slice of semiconductor, such as a crystalline silicon (c-Si), used for the fabrication of integrated circuits and, in photovoltaics, to manufacture solar cells. The wafer serves as the substrate for microelectronic devices built in and upon the wafer. It undergoes many microfabrication processes, such as doping, ion implantation, etching, thin-film deposition of various materials, and photolithographic patterning.
Evaporation (deposition)Evaporation is a common method of thin-film deposition. The source material is evaporated in a vacuum. The vacuum allows vapor particles to travel directly to the target object (substrate), where they condense back to a solid state. Evaporation is used in microfabrication, and to make macro-scale products such as metallized plastic film. Evaporation involves two basic processes: a hot source material evaporates and condenses on the substrate. It resembles the familiar process by which liquid water appears on the lid of a boiling pot.
Giant-impact hypothesisThe giant-impact hypothesis, sometimes called the Big Splash, or the Theia Impact, suggests that the Moon was formed from the ejecta of a collision between the early Earth and a Mars-sized planet, approximately 4.5 billion years ago in the Hadean eon (about 20 to 100 million years after the Solar System coalesced). The colliding body is sometimes called Theia, named after the mythical Greek Titan who was the mother of Selene, the goddess of the Moon.
Soil erosionSoil erosion is the denudation or wearing away of the upper layer of soil. It is a form of soil degradation. This natural process is caused by the dynamic activity of erosive agents, that is, water, ice (glaciers), snow, air (wind), plants, and animals (including humans). In accordance with these agents, erosion is sometimes divided into water erosion, glacial erosion, snow erosion, wind (aeolean) erosion, zoogenic erosion and anthropogenic erosion such as tillage erosion.
