Publication

Simple and low cost fabrication of embedded microchannels by using a new thick-film photoplastic

Philippe Renaud
1997
Conference Papers

Abstract

In this paper we describe new ways to realise micro-channels. The used technologies are based on a novel thick-film photoplastic, the SU-8. This photoresist has outstanding properties, allowing the realisation of high aspect ratio microstructures. It is a simple and low-cost fabrication process. The micro channels developed in this work it will be used for the realisation of thermal flow-sensors.

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Philippe Renaud
1997
Conference Papers

Abstract

Official source

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Simple and low cost fabrication of embedded microchannels by using a new thick-film photoplastic

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