Publication

NANOINGENEERING OF SIN MEMBRANES USING FIB

Horst Arthur Vogel, Christian Santschi
2005
Reports

Abstract

Applications of thin SixNy membranes may be found in miscellaneous fields such as MEMS and NEMS as well as biotechnology. FIB is an excellent tool in order to realize nano-structures on membranes achieving the ultimate limits and rapid prototyping.

Official source

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NANOINGENEERING OF SIN MEMBRANES USING FIB

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