Publication

Mass-Spectrometric Detection of Low-Ppm Contaminants in Sputter Process Systems at 10-2 Mbar, Using a Directly Exposed Ion-Source

Paul Muralt
1990
Journal Articles

Abstract

Trace contaminants in sputter atmospheres (10(-2) mbar Ar) are determined with a mass spectrometer whose ionizer is directly exposed to the process pressure, whereas the quadrupole filter is kept at high vacuum. The background limitations inherent to conventional differentially pumped analyzers are overcome. Detection limits are 1 ppm for H2O and few ppb for other species.

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Paul Muralt
1990
Journal Articles

Abstract

Official source

Related concepts (29)

Mass spectrometry

Mass spectrometry (MS) is an analytical technique that is used to measure the mass-to-charge ratio of ions. The results are presented as a mass spectrum, a plot of intensity as a function of the mass-to-charge ratio. Mass spectrometry is used in many different fields and is applied to pure samples as well as complex mixtures. A mass spectrum is a type of plot of the ion signal as a function of the mass-to-charge ratio.

Sputtering

In physics, sputtering is a phenomenon in which microscopic particles of a solid material are ejected from its surface, after the material is itself bombarded by energetic particles of a plasma or gas. It occurs naturally in outer space, and can be an unwelcome source of wear in precision components. However, the fact that it can be made to act on extremely fine layers of material is utilised in science and industry—there, it is used to perform precise etching, carry out analytical techniques, and deposit thin film layers in the manufacture of optical coatings, semiconductor devices and nanotechnology products.

Quadrupole mass analyzer

In mass spectrometry, the quadrupole mass analyzer (or quadrupole mass filter) is a type of mass analyzer originally conceived by Nobel laureate Wolfgang Paul and his student Helmut Steinwedel. As the name implies, it consists of four cylindrical rods, set parallel to each other. In a quadrupole mass spectrometer (QMS) the quadrupole is the mass analyzer - the component of the instrument responsible for selecting sample ions based on their mass-to-charge ratio (m/z).

Related publications (1)

Mass-Spectrometric Detection of Low-Ppm Contaminants in Sputter Process Systems at 10-2 Mbar, Using a Directly Exposed Ion-Source

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