Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer

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Piezoelectrics are materials that linearly deform in response to an applied electric field. As a fundamental prerequisite, piezoelectric materials must have a noncentrosymmetric crystal structure. For more than a century, this has remained a major obstacle ...

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In this study, we analyze a 3rd type of FBAR's fundamental mode by finite element method. We show the importance of the substrate's wave velocity and conductivity on the electromechanical coupling efficiency. Then we demonstrate that etching traditional SA ...

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We present the fabrication of 570-mu m-thick millimeter-sized soda-lime-silicate float-glass blocks with a 1-mu m-thick AlN thin-film piezoelectric transducer sandwiched between thin metallic electrodes and deposited on the top surface. The electromechanic ...

Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer

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Induced giant piezoelectricity in centrosymmetric oxides

Carrier-selective contacts using metal compounds for crystalline silicon solar cells

A formula for the admittance of laterally excited bulk wave resonators (XBARs)

An Extension of the Guided Wave M‐Component Model Taking Into Account the Presence of a Tall Strike Object

Optimized electrochemical breakdown etching using temporal voltage variation for formation of nanopores in a silicon membrane

Thermal management of components for high energy physics experiments and space applications

Study on the Performances of AlScN based SAW/BAW Hybrid Resonators A Parametric Analysis of Acoustic Wave Resonators with Large Figure of Merit

Crystalline Order in Compound Semiconductors in Nanoscale Structures and Thin Films

Prototype mitre bends of the ex-vessel waveguide system for the ITER upper launcher: Thermal hydraulic simulations and experiments with off-center mm-wave beams

Fabrication, Characterization, and Simulation of Glass Devices with AlN Thin-Film Transducers for Excitation of Ultrasound Resonances