Ultrasonic monolithic piezoelectric multi DOF actuators for mobile microrobots

We propose a new type of “hybrid” ultrasonic driving principle for our monolithic piezoelectric actuators, which consist of simple electrode patterning on a PZT ceramic substrate The operating principle of the proposed USM is based on the conversion of elliptical motion generated at the leg tip of the actuator into a rigid motion of the slider. The lateral and transversal modes are activated using two sinus signals with a phase shift of 90 degrees. Speed as high as 20mm/s was achieved (with an excitation of 30 kHz) while a resolution as small as 4nm is feasible.