Subtractive patterning for high-resolution electrodes in dielectric elastomer actuators

In recent years, significant progress has been achieved in the fabrication of dielectric elastomer actuators (DEAs). Reductions in dielectric elastomer thickness have enabled lower actuation voltages, while electrode materials have been optimized to exploit properties such as high electrical conductivity, ease of fabrication or optical transparency. Most of these advancements, however, have primarily focused on the layering of DEAs. The precision of electrode patterning has received comparatively little attention, partly because existing methods provide sufficient accuracy, and partly because further optimization often entails trade-offs such as complication of the fabrication or limitations in material selection. In this work, we present the advantage of not only using an additive, but also a subtractive fabrication method that enables control over electrode geometry. Beyond the patterning of electrodes, this approach also allows the adjustment of electrode thickness, thereby enhancing fabrication versatility. To do so, a CO2 and Yb fiber laser are employed to pattern DEAs during the fabrication process. The fabrication process, its characterization, and its practical relevance are demonstrated through selected application examples. In the future, the compatibility of the process with additive and subtractive methods may facilitate integration into scalable manufacturing workflows, supporting the development of advanced soft actuators and sensors.