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This paper presents a new technique for continuously calibrating the sensitivity of a current measurement microsystem based on a Hall magnetic field sensor. An integrated reference coil generates a magnetic field for calibration. Using a variant of the chopper modulation, the spinning current technique, combined with a second modulation of the reference signal, the sensitivity of the complete system is continuously measured without interrupting normal operation. Modulation and demodulation schemes allowing the joint processing of both external and reference magnetic fields are proposed. Additional techniques for extracting the very low reference signal are presented. The implementation of the microsystem is then discussed. Finally, measurements validate the calibration principle. A thermal drift lower than 50 ppm/degrees C is achieved. This is 6-10 times less than in state-of-the-art implementations. Furthermore, the calibration technique also compensates drifts due to mechanical stresses and ageing.
Salim Bennouna, Abhijit Bhausaheb Bendre
Romain Christophe Rémy Fleury, Zhe Zhang, Haoye Qin, Zhechen Zhang, Qiaolu Chen