Publication

Run-to-Run Control of DC-Sputtering Processes

Dominique Bonvin, Denis Gillet
2001
Conference Papers

Abstract

A new nonlinear model is proposed for describing the rela-tionship between the relevant inputs and outputs of a DC-magnetron sputtering system used in a manufacturing line for digital-compact discs and analogous optical data-storage devices. It is shown that the process is inherently discrete, and that it has an inherent transport delay. A control scheme is proposed consisting of a Smith predictor to address the delayed dynamics, and a globally linearizing operator is introduced to address the nonlinear nature of the model. The control structure requires knowledge of two model parameters, namely, the maximum film reflectivity and the characteristic energy of the sputterer, and makes use of one tuning variable, namely, the parameter of an integral-only controller. The performance of the control system is illustrated via a simulation study.

Official source

https://infoscience.epfl.ch/entities/publication/ce3203be-b5c5-41f4-8b16-7282fa0ae6f9

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Dominique Bonvin, Denis Gillet
2001
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/ce3203be-b5c5-41f4-8b16-7282fa0ae6f9

About this result

Related concepts (32)

Simulation

A simulation is the imitation of the operation of a real-world process or system over time. Simulations require the use of models; the model represents the key characteristics or behaviors of the selected system or process, whereas the simulation represents the evolution of the model over time. Often, computers are used to execute the simulation. Simulation is used in many contexts, such as simulation of technology for performance tuning or optimizing, safety engineering, testing, training, education, and video games.

Compact disc

The compact disc (CD) is a digital optical disc data storage format that was co-developed by Philips and Sony to store and play digital audio recordings. In August 1982, the first compact disc was manufactured. It was then released in October 1982 in Japan and branded as Digital Audio Compact Disc. It was released on March 2, 1983 in North America and Europe. The format was later adapted (as CD-ROM) for general-purpose data storage.

Nonlinear system

In mathematics and science, a nonlinear system (or a non-linear system) is a system in which the change of the output is not proportional to the change of the input. Nonlinear problems are of interest to engineers, biologists, physicists, mathematicians, and many other scientists since most systems are inherently nonlinear in nature. Nonlinear dynamical systems, describing changes in variables over time, may appear chaotic, unpredictable, or counterintuitive, contrasting with much simpler linear systems.

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