Publication

Miniaturized Foldable Electrodes with Direct CMOS Integration for Implantable Applications

2025

Abstract

This study demonstrates the feasibility of directly integrating foldable microelectrodes (starting from 250 μ m width and 1600 μ m length) with CMOS front-end for implantable biomedical applications. Mechanical robustness was evaluated through Finite Element Method (FEM) simulations and validated by implantation into an agarose phantom, showing no structural failure. Electrical performance was assessed using Electrochemical Impedance Spectroscopy (EIS) measurement, with results in agreement with values reported in the literature, confirming the integrity of the microfabrication process. Additionally, an electrochemical sensing front-end was also designed, consisting of a full-custom digital potentiostat to illustrate functional capability. This study presents a complete and reproducible microfabrication workflow, providing a promising foundation for future development of highly integrated, minimally invasive bioelectronic interfaces.

Official source

https://infoscience.epfl.ch/entities/publication/cbb2bcdc-8bb2-48ba-b96e-65f320f0c34b

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2025

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/cbb2bcdc-8bb2-48ba-b96e-65f320f0c34b

About this result

Related concepts (27)

Implant (medicine)

An implant is a medical device manufactured to replace a missing biological structure, support a damaged biological structure, or enhance an existing biological structure. For example, an implant may be a rod, used to strengthen weak bones. Medical implants are human-made devices, in contrast to a transplant, which is a transplanted biomedical tissue. The surface of implants that contact the body might be made of a biomedical material such as titanium, silicone, or apatite depending on what is the most functional.

Microfabrication

Microfabrication is the process of fabricating miniature structures of micrometre scales and smaller. Historically, the earliest microfabrication processes were used for integrated circuit fabrication, also known as "semiconductor manufacturing" or "semiconductor device fabrication". In the last two decades microelectromechanical systems (MEMS), microsystems (European usage), micromachines (Japanese terminology) and their subfields, microfluidics/lab-on-a-chip, optical MEMS (also called MOEMS), RF MEMS, PowerMEMS, BioMEMS and their extension into nanoscale (for example NEMS, for nano electro mechanical systems) have re-used, adapted or extended microfabrication methods.

Etching (microfabrication)

Etching is used in microfabrication to chemically remove layers from the surface of a wafer during manufacturing. Etching is a critically important process module, and every wafer undergoes many etching steps before it is complete. For many etch steps, part of the wafer is protected from the etchant by a "masking" material which resists etching. In some cases, the masking material is a photoresist which has been patterned using photolithography. Other situations require a more durable mask, such as silicon nitride.