Publication

Ultrasonic flexural Lamb-wave actuators based on PZT thin film

Nava Setter
1998
Journal Articles

Abstract

The fabrication and characterization of a microfabricated acoustic Lamb-wave device driven by a piezoelectric PZT (modified lead zirconate titanate Pb(Zr-x,Ti1-x)O-3) sol-gel thin film for use in mass-transport, mass-filtering and fluid-delivery systems are presented. Ultrasonic flexural plate waves (FPWs) at frequencies of the order of megahertz are generated and detected in a thin acoustic composite membrane by using two interdigitated transducers (IDTs) patterned on a 0.75 mu m thick piezoelectric ceramic PZT film, which provides high acoustic power for physical translation of fluid and microparticles. (C) 1998 Elsevier Science S.A.

Official source

https://infoscience.epfl.ch/entities/publication/c2ddeeb2-9950-401c-9eba-974b85868504

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Nava Setter
1998
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/c2ddeeb2-9950-401c-9eba-974b85868504

About this result

Related concepts (26)

Piezoelectricity

Piezoelectricity (ˌpiːzoʊ-,_ˌpiːtsoʊ-,_paɪˌiːzoʊ-, piˌeɪzoʊ-,_piˌeɪtsoʊ-) is the electric charge that accumulates in certain solid materials—such as crystals, certain ceramics, and biological matter such as bone, DNA, and various proteins—in response to applied mechanical stress. The word piezoelectricity means electricity resulting from pressure and latent heat. It is derived (an ancient source of electric current). The piezoelectric effect results from the linear electromechanical interaction between the mechanical and electrical states in crystalline materials with no inversion symmetry.

Thin film

A thin film is a layer of material ranging from fractions of a nanometer (monolayer) to several micrometers in thickness. The controlled synthesis of materials as thin films (a process referred to as deposition) is a fundamental step in many applications. A familiar example is the household mirror, which typically has a thin metal coating on the back of a sheet of glass to form a reflective interface. The process of silvering was once commonly used to produce mirrors, while more recently the metal layer is deposited using techniques such as sputtering.

Lead zirconate titanate

Lead zirconate titanate, also called lead zirconium titanate and commonly abbreviated as PZT, is an inorganic compound with the chemical formula It is a ceramic perovskite material that shows a marked piezoelectric effect, meaning that the compound changes shape when an electric field is applied. It is used in a number of practical applications such as ultrasonic transducers and piezoelectric resonators. It is a white to off-white solid. Lead zirconium titanate was first developed around 1952 at the Tokyo Institute of Technology.

Related publications (6)

Ultrasonic flexural Lamb-wave actuators based on PZT thin film

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