Publications related to High-efficiency non-ablative UV laser nano-scale processing of fused silica by stable filamentation

Related publications (31)

Grayscale nanopatterning for strain-engineered 2D materials

Semiconductor innovation is shifting from traditional dimensional scaling toward novel architectures and materials as lithography nears its physical limits. FinFETs and GAAFETs have marked key milestones, with scaling now progressing through 3D stacking. M ...

EPFL2025

Self-organised UV Femtosecond Laser Induced Modifications in the Bulk of Fused Silica

Yves Bellouard, Ernesto Gribaudo

By focusing a femtosecond laser beam in the bulk of a transparent material one can locally change the physical properties of the material itself. The interaction between NIR pulses and fused silica has been extensively studied in the past, showing how vari ...

IEEE2025

Exciton migration in two-dimensional materials

Giovanni Consalvo Cistaro

Excitons play an essential role in the optical response of two-dimensional materials. These are bound states showing up in the band gaps of many-body systems and are conceived as quasiparticles formed by an electron and a hole. By performing real-time simu ...

Nature Portfolio2024

Advanced Silicon and SWIR Single-Photon Avalanche Diodes: Design, Simulation, and Characterization

Ekin Kizilkan

Low-level light detection with high spatial and timing accuracy is a growing area of interest by virtue of applications such as light detection and ranging (LiDAR), biomedical imaging, time-resolved Raman spectroscopy, and quantum applications. Single-phot ...

EPFL2024

High power ultraviolet LED illumination systems: coherence properties and applications in photolithography

Johana Bernasconi

Mask-aligner photolithography is a technology used to replicate patterns from a mask to a photosensitive substrate. It is widely used in the fabrication of MEMS and micro-optical components, and for other applications with dimensions in the micrometer rang ...

EPFL2018

High power modular LED-based illumination system for lithography applications

Hans Peter Herzig, Toralf Scharf, Wilfried Noell, Raoul Kirner, Johana Bernasconi

Mask-aligner lithography is a technology used to transfer patterns with critical dimensions in the micrometer range from below 1 micron for contact printing to a dozen of microns in proximity printing. This technology is widely used in the fabrication of M ...

2018

Symmetry breakdown of electron emission in extreme ultraviolet photoionization of argon

Philip Johannes Walter Moll, Eugenio Ferrari, David Ferdinand Scholz

Short wavelength free-electron lasers (FELs), providing pulses of ultrahigh photon intensity, have revolutionized spectroscopy on ionic targets. Their exceptional photon flux enables multiple photon absorptions within a single femtosecond pulse, which in t ...

Nature Publishing Group2018

Compact laser-assisted tools for high-resolution additive manufacturing

Paul Delrot

Micro-additive manufacturing has become an enabling technology in biomedical research as it allows for instance creating functional microstructures or studying cellular interactions at the microscale. Among the various manufacturing techniques laser-actuat ...

EPFL2018

First developments towards producing inductive magnetic sensors using state-of-the-art photolithography techniques

Ambrine Douhane, Marcus Cemes, Duccio Testa

Inductive magnetic sensors are needed for tokamak operation to provide the low-frequency (LF) measurements leading to the equilibrium reconstruction and to monitor the higher frequency (HF) instabilities; the HF magnetic sensors are often also used as a ba ...

2023

Three-dimensional microfabrication through a multimode optical fiber

Demetri Psaltis, Christophe Moser, Donald Benjaman Conkey, Nicolino Stasio, Edgar Emilio Morales Delgado

3D printing based on additive manufacturing is an advanced manufacturing technique that allows the fabrication of arbitrary macroscopic and microscopic objects. Many 3D printing systems require large optical elements or nozzles in proximity to the built st ...

Optical Soc Amer2017

The impact of sorbent geometry on the sulphur adsorption under supercritical water conditions: a numerical study

Christian Ludwig, Andrea Testino

A numerical model to show the impact of the adsorption bed geometry on the desulfurization process of wet biomass under supercritical water (SCW) gasification process has been developed. Three different geometries, straight channels (pipe), sharp-edged cha ...

Springer Heidelberg2017

A Deep Etching Mechanism for Trench-Bridging Silicon Nanowires

Yusuf Leblebici, Zuhal Tasdemir

Introducing a single silicon nanowire with a known orientation and dimensions to a specific layout location constitutes a major challenge. The challenge becomes even more formidable, if one chooses to realize the task in a monolithic fashion with an extrem ...

Institute of Physics2016

Fabrication defects and grating couplers in III-nitride photonic crystal nanobeam lasers (Conference Presentation)

Nicolas Grandjean, Jean-François Carlin, Raphaël Butté, Ian Michael Rousseau

We report a numerical and experimental investigation of fabrication tolerances and outcoupling in optically pumped III-nitride nanolasers operating near lambda = 460 nm, in which feedback is provided by a one-dimensional photonic crystal nanobeam cavity an ...

Spie-Int Soc Optical Engineering2016

A perfect X-ray beam splitter and its applications to time-domain interferometry and quantum optics exploiting free-electron lasers

Gabriel Aeppli

X-ray free-electron lasers (FELs) deliver ultrabright X-ray pulses, but not the sequences of phase-coherent pulses required for time-domain interferometry and control of quantum states. For conventional split-and-delay schemes to produce such sequences, th ...

National Academy of Sciences2022

Post-cmos processing and 3d integration based on dry-film lithography

Yusuf Leblebici, Carlotta Guiducci, Yüksel Temiz

A method for performing a post processing pattern on a diced chip having a foot-print, comprises the steps of providing a support wafer; applying a first dry film photoresist to the support wafer; positioning a mask corresponding to the footprint of the di ...

2015

Porous Nitride Light-Emitting Diodes

Anna Fontcuberta i Morral, Nicolas Tappy

A porous InGaN/GaN blue light-emitting diode is demonstrated using selective area sublimation. Transmission electron microscopy reveals that the structure is porous down to the Si substrate; however, the porosity is higher in the GaN buffer, while smaller ...

2022

Microfluidic Scintillation Detectors for High Energy Physics

Pietro Maoddi

This thesis deals with the development and study of microfluidic scintillation detectors, a technology of recent introduction for the detection of high energy particles. Most of the interest for such devices comes from the use of a liquid scintillator, whi ...

EPFL2015

In-plane fabrication of insulated gold-tip probes for electrochemical and force spectroscopy molecular experiments

Nico de Rooij, Terunobu Akiyama, Peter Van der Wal, Sebastian Gautsch, Yexian Wu

A new and versatile fabrication process of insulated gold tip probes for atomic force microscopy (AFM) is presented by Wu et al. (In-plane fabricated insulated gold-tip probe for electrochemical and molecular experiments, in: 2013 IEEE 26th International C ...

Elsevier2014

A Die-Level Post-CMOS Processing Protocol for Multi-Layer 3D Integration

Yusuf Leblebici, Davide Sacchetto, Clemens Benedict Nyffeler, Seniz Esra Küçük

In this work, a chip-level post-CMOS processing protocol for 3D integration is presented to achieve multilayer stacking. This protocol includes TSV formation on the top chip, bonding the chips on top of each other, and finally the electrical connection pro ...

2014

Encapsulated Low Frequency Vibrating Body Field Effect Resonator

Marion Hermersdorf

Resonators for time and frequency reference applications are essential elements found in most electronic devices surrounding us. The continuous minimization and ubiquitous distribution of such electronic devices and circuits demands for resonators of small ...

EPFL2013