Publication

An innovative micro optical element assembly robot

2001
Journal Articles

Abstract

Concerns the fabrication of miniaturized optical devices with height attachment precision. For active alignment of micro-optical elements machined with tolerances lower than the intended precision, an accurate 6-DOF robot is needed. This article describes such a structure, which is named Sixtiff. Sixtiff was first developed for the use of a new optical assembly technology, TRIMO-SMD. The robot is a hybrid serial-parallel structure composed of five linear stages and one angular stage. It has a stiff structure, without floating

Official source

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2001
Journal Articles

Abstract

Official source

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Related publications (2)

An innovative micro optical element assembly robot

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