Publication

Fabrication and characterisation of ultrasensitive monocrystalline silicon cantilevers with integrated magnetic tips

2006
Student Projects

Abstract

During this project, ultrasensitive cantilevers designed for nuclear magnetic resonance applications were fabricated and characterised. The cantilevers are 500, 340 or 200 μm long, 10 or 20 μm wide and 500 or 340 nm thick and integrate a thin film of cobalt at the free end. This thin-film can be magnetised. Their fabrication requires novel techniques such as silicon-on-insulator technology, Al protective layer deposition, high anisotropic dry etching or HF-vapour release. A dynamic and a static model of the cantilevers were elaborated. The models describe the behaviour of the cantilevers when actuated by an external magnetic field in the air and in vacuum.

Official source

https://infoscience.epfl.ch/entities/publication/b9e86ee8-33ff-470b-a8b3-6f01d3ef47e0

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2006
Student Projects

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/b9e86ee8-33ff-470b-a8b3-6f01d3ef47e0

About this result

Related concepts (32)

Nuclear magnetic resonance

Nuclear magnetic resonance (NMR) is a physical phenomenon in which nuclei in a strong constant magnetic field are perturbed by a weak oscillating magnetic field (in the near field) and respond by producing an electromagnetic signal with a frequency characteristic of the magnetic field at the nucleus. This process occurs near resonance, when the oscillation frequency matches the intrinsic frequency of the nuclei, which depends on the strength of the static magnetic field, the chemical environment, and the magnetic properties of the isotope involved; in practical applications with static magnetic fields up to ca.

Thin film

A thin film is a layer of material ranging from fractions of a nanometer (monolayer) to several micrometers in thickness. The controlled synthesis of materials as thin films (a process referred to as deposition) is a fundamental step in many applications. A familiar example is the household mirror, which typically has a thin metal coating on the back of a sheet of glass to form a reflective interface. The process of silvering was once commonly used to produce mirrors, while more recently the metal layer is deposited using techniques such as sputtering.

Nuclear magnetic resonance spectroscopy

Nuclear magnetic resonance spectroscopy, most commonly known as NMR spectroscopy or magnetic resonance spectroscopy (MRS), is a spectroscopic technique to observe local magnetic fields around atomic nuclei. This spectroscopy is based on the measurement of absorption of electromagnetic radiations in the radio frequency region from roughly 4 to 900 MHz. Absorption of radio waves in the presence of magnetic field is accompanied by a special type of nuclear transition, and for this reason, such type of spectroscopy is known as Nuclear Magnetic Resonance Spectroscopy.

Related publications (32)

Fabrication and characterisation of ultrasensitive monocrystalline silicon cantilevers with integrated magnetic tips

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