Publication

Thin piezoelectric films for micro-electromechanical components

Nava Setter, Paul Muralt, Thomas Maeder
1994
Conference Papers

Abstract

PbZrxT1-x O3 (PZT) films on silicon substrates can be used for various micro mechanical devices. An insitu reactive sputter deposition process at 600°C has been developed for this application. Three magnetron sources with metal targets have been applied simultaneously. Within a certain process window, the [Pb] / ([Zr]+[Ti]) ratio in the film is self stabilized at stoichiometry by desorption of the excess Pb. Films of up to 1 micron thickness have been fabricated. For the composition x = 0.4 the films exhiba a remanent polarization of 20 to 25 µC/cm2, a dielectric constant of 1100 and a piezoelectric coefficient of 40 pC/N. The classical Pt/Ti bottom electrode needed to be improved by an additional layer of TiO2 between Ti and Pt. As a second choice the metallic oxide RuO2 has been investigated, too. PZT films on prototype membrane structures are currently processed. They will be applied in prototype micromotors for the watch industry.

Official source

https://infoscience.epfl.ch/entities/publication/b28381c8-680f-4846-83ff-c9b2f77128dd

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Nava Setter, Paul Muralt, Thomas Maeder
1994
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/b28381c8-680f-4846-83ff-c9b2f77128dd

About this result

Related concepts (32)

Piezoelectricity

Piezoelectricity (ˌpiːzoʊ-,_ˌpiːtsoʊ-,_paɪˌiːzoʊ-, piˌeɪzoʊ-,_piˌeɪtsoʊ-) is the electric charge that accumulates in certain solid materials—such as crystals, certain ceramics, and biological matter such as bone, DNA, and various proteins—in response to applied mechanical stress. The word piezoelectricity means electricity resulting from pressure and latent heat. It is derived (an ancient source of electric current). The piezoelectric effect results from the linear electromechanical interaction between the mechanical and electrical states in crystalline materials with no inversion symmetry.

Thin film

A thin film is a layer of material ranging from fractions of a nanometer (monolayer) to several micrometers in thickness. The controlled synthesis of materials as thin films (a process referred to as deposition) is a fundamental step in many applications. A familiar example is the household mirror, which typically has a thin metal coating on the back of a sheet of glass to form a reflective interface. The process of silvering was once commonly used to produce mirrors, while more recently the metal layer is deposited using techniques such as sputtering.

Thin-film bulk acoustic resonator

A thin-film bulk acoustic resonator (FBAR or TFBAR) is a device consisting of a piezoelectric material manufactured by thin film methods between two conductive – typically metallic – electrodes and acoustically isolated from the surrounding medium. The operation is based on the piezoelectricity of the piezolayer between the electrodes. FBAR devices using piezoelectric films with thicknesses ranging from several micrometres down to tenths of micrometres resonate in the frequency range of 100 MHz to 20 GHz.

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Thin piezoelectric films for micro-electromechanical components

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