Two-dimensional cantilever array with varying spring constants and tip radii for life-science applications

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Cryogenic MOSFET Modeling for Large-Scale Quantum Computing

Arnout Lodewijk M Beckers

Promising results of state-of-the-art quantum computers fuel a world-wide effort in academic and private research laboratories to scale up the number of qubits and improve their characteristics in large arrays. To meet the scale-up challenge, innovative mi ...

EPFL2021

The Michelangelo step: removing scalloping and tapering effects in high aspect ratio through silicon vias

Benoît Bruno Pasquier, Edoardo Charbon, Sandro Carrara, Simone Frasca, Rebecca Camilla Leghziel

We present here, for the first time, a fabrication technique that allows manufacturing scallop free, non-tapered, high aspect ratio in through-silicon vias (TSVs) on silicon wafers. TSVs are among major technology players in modern high-volume manufacturin ...

Nature Research2021

Microfabricated nanomotion detectors for rapid cells viability tests

Anton Malovichko

The widespread use of antibiotics and antifungal drugs has provoked an increasing number of multi-resistant bacteria and fungi. The emergence of multiresistance to antibiotics has been now recognized as a very serious public health issue. In order to targe ...

EPFL2021

Prioritization of cell types responsive to biological perturbations in single-cell data with Augur

Grégoire Courtine, Jordan Squair, Matthieu Pierre Gautier, Michael Alexander Skinnider

Advances in single-cell genomics now enable large-scale comparisons of cell states across two or more experimental conditions. Numerous statistical tools are available to identify individual genes, proteins or chromatin regions that differ between conditio ...

NATURE RESEARCH2021

Crystalline Order in Compound Semiconductors in Nanoscale Structures and Thin Films

Mahdi Zamani

Semiconductors materials and devices are essential building blocks for many of the technologies deeply embedded in modern life. Improving the performance of semiconductor devices requires a deeper understanding of the fundamental mechanisms controlling the ...

EPFL2021

GaN vertical power devices on silicon substrates

Riyaz Mohammed Abdul Khadar

Gallium Nitride (GaN) is a wonder material which has widely transformed the world by enabling energy-efficient white light-emitting diodes. Over the past decade, GaN has also emerged as one of the most promising materials for developing power devices which ...

EPFL2021

Smart Slit Assembly Employing Continuously Tunable MEMS Shutter

Niels Quack, Hamed Sattari, Gergely Huszka, Anton Lagosh

We present the concept and detailed design of a Smart Slit Assembly for next generation spectrometers, and we experimentally demonstrate operation of an individual 221 mu m x 111 mu m smart slit channel employing a MEMS actuated shutter to continuously mod ...

SPIE-INT SOC OPTICAL ENGINEERING2021

Fabrication and Characterization of High Aspect Ratio Amorphous Silicon Based Microchannel Plates

Christophe Ballif, Nicolas Würsch, Janina Christine Isabelle Löffler, Samira Alexandra Frey, Mohammad Beygi

This contribution focuses on the fabrication and characterization of microchannel plates made of hydrogenated amorphous silicon (AMCPs). Flexible fabrication processes and the semi-conducting nature of amorphous silicon could give these detectors the advan ...

2021